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MKS 356 Micro-Ion Plus Series User Manual

MKS 356 Micro-Ion Plus Series
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Chapter 3
54 Micro-Ion
®
Module Instruction Manual - 356007-GP
TS - Calibrate the Module
at Atmosphere
Example TS command from host: #01TS
Example response from module: *01 PROGM OK
If the module returns a “RANGE ER” message in response to the TS
command, the atmospheric calibration has failed. The raw sensor voltage is
outside the normal range for the Conductron sensor. See Table 3-20 on
page 57 to troubleshoot the problem.
If the module has an optional display, the display will indicate “– –”
during the push-button calibration.
TZ - Calibrate the Module
at Vacuum
Example TZ command from host: #01TZ
Example response from module: *01 PROGM OK
If the module returns a “RANGE ER” message in response to the TZ
command, the vacuum pressure calibration has failed. The raw sensor
voltage is outside the normal range for the offset of the Conductron sensor.
See page 57 to troubleshoot the problem.
The Micro-Ion gauge will turn ON after the TZ command has been sent.
SU – Set the Pressure Unit The example set unit (SU) command sets the pressure unit to Torr:
Example SU command from host: #01SUT
Response from module: *01 PROGM OK
An SUT command sets the pressure unit to Torr.
An SUM command sets the pressure unit to millibar.
An SUP command sets the pressure unit to Pascal.
RST – Reset the Module
to Power-up State
The reset (RST) command resets the module to power-up status.
RST command from host: #01RST
Response from module: None
Sending the RST command has the same effect as cycling power to the
module. Communication is re-enabled two seconds after you’ve sent the
RST command.
TLU – Toggle the Locked
Functions
In the default operating mode, all interface functions are unlocked. Use the
toggle lock/unlock (TLU) command to lock or unlock any of the interface
functions listed in Table 3-18.

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MKS 356 Micro-Ion Plus Series Specifications

General IconGeneral
BrandMKS
Model356 Micro-Ion Plus Series
CategoryControl Unit
LanguageEnglish

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