MKS Baratron DMA Series User Manual

80BTroubleshooting 9BAppendix A: Product Specifications
88
Performance Specifications
Accuracy
(nonlinearity,
hysteresis, and nonrepeatability)
Range (Torr)
(% of Reading)
Standard Accuracy
(% of Reading)
Optional
(% of Reading)
DMA (Ambient)
DMA (45° C)
DMA (80° C)
1, 2, 5
10, 20, 50, 100,
200, 500, 1000
0.02
0.05, 0.1, 0.25, 0.5
1, 2, 5, 10, 20, 50,
100, 200, 500,
1000
0.05, 0.1, 0.25, 0.5
1, 2, 5, 10, 20, 50,
100, 200, 500,
1000
0.25%
0.25%
0.25%
0.15%
0.12%
0.5%
0.25%
0.15%
Temperature Coefficients
Range
Zero
(% Full Scale/°C)
Span
(% Reading/°C)
DMA (Ambient)
DMA (45° C)
DMA (80° C)
1 Torr
2 and 5 Torr
10 Torr and up
0.02 Torr
0.05 Torr
0.1, 0.25, 0.5 Torr
1 Torr and up
0.05 Torr
0.1, 0.25, 0.5 Torr
1 Torr and up
0.015%
0.01%
0.005%
0.03%
0.015%
0.005%
0.002%
0.020%
0.01%
0.002%
0.04%
0.04%
0.04%
0.02%
0.02%
0.02%
0.02%
0.02%
0.02%
0.02%
Burst Pressure 5 times Full Scale or 90 psia, whichever is greater
Leak Integrity Internal to external <10
-9
scc/sec He
100 million cycles to FS without leakage
–1 million cycles for
≤1 Torr
Overpressure Limit Without
Damage
45 psia (310 kPa)
Resolution 0.001% Full Scale
Time Constant
< 20 msec (< 40 msec ≤ 1 Torr units)
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MKS Baratron DMA Series Specifications

General

Brand	MKS
Model	Baratron DMA Series
Category	Measuring Instruments
Language	English