MKS Baratron DMA Series User Manual

10BAppendix B: Model Code Explanation 81BModel Code
93
Accuracy (X)
The accuracy is specified by a single letter code.
Accuracy
Ordering
Code
0.12% of Reading
45° C, 1.0 thru 1000 Torr
C
0.15% of Reading
45° C, 0.05 to 1.0 Torr
D
0.25% of Reading
Ambient, 1.0 Torr thru 1000 Torr
45° C, 0.02 Torr
80° C, 1.0 thru 1000 Torr
E
0.50% of Reading
Ambient, 0.1 Torr to 1.0 Torr
80° C, 0.05 to 1.0 Torr
F
Sensor Control Temperature
The sensor control temperature is designated by a single letter code.
Sensor Control Temperature
Ordering
Code
Ambient A
45° C J
80° C K
Options
The options are designated by a single letter code.
Options
Ordering
Code
None N
Etch Baffle Sensor E
Calibration Type
The calibration type is designated by a single letter code.
Calibration Type
Ordering
Code
No Special Requirement,
1 Torr and Above
N
Horizontal Calibration, <1 Torr H
Vertical Calibration, <1 Torr V
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MKS Baratron DMA Series Specifications

General

Brand	MKS
Model	Baratron DMA Series
Category	Measuring Instruments
Language	English