MKS GMW-25 User Manual

OPERATION MANUAL
Manual Order Number: 1050-001 Copyright © 1996 MKS Instruments, Inc. All rights reserved.
Revision Level: B 10/07/04 MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
GMW-25
RF Plasma Generator
HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS
UNIT. All operating personnel should use extreme caution in handling
these voltages and be thoroughly familiar with this manual.
CFC's
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE
MAINTENANCE OF THIS PRODUCT. In recognition of our responsibility to protect
the environment, this product has been manufactured without the use of CFC's. The
no-clean flux now used in all soldering operations may leave a small inert residue that
will not affect the performance of the product. The use of CFC's for cleaning or
maintenance may result in partial liquification of the no-clean flux residue, which will
damage the unit and void the warranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO-9001:2000-Quality-
System-compliant facility.
Notice
The material contained in this manual is subject to change without notice. No part of this manual may be
reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying or
electronic transmission or other means of reproduction or distribution without prior written consent of MKS,
ENI Products. The drawings, specifications and other technical information contained in this manual are the
property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as
the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.

MKS GMW-25 Specifications

General

Model	GMW-25
Category	Inverter
Output Power	25 kW
Frequency	50/60 Hz
Cooling Method	Forced Air Cooling
Protection Level	IP65
Output Voltage	380V

Summary

Warranty

Service And Technical Assistance

Details procedures for obtaining service and technical support for the generator.

Chapter 1 - Introduction

1.2 Safety Considerations

Outlines critical safety precautions and warnings for operating the generator.

1.5 Getting Started Quickly

Chapter 2 - System Installation

2.1 Unpacking/Inspection

2.2 Installation Requirements

2.3 Rack Installation

2.4 System Interconnect

Details the available analog interface options for connecting external systems.

2.4.1 Standard 25-pin Analog I/O Interface

Describes the 25-pin analog I/O interface pin assignments and functions.

2.4.2 37-pin Analog I/O Interface

Describes the 37-pin analog I/O interface pin assignments and functions.

2.4.3 9-pin PL-2HF Analog I/O Interface

Describes the 9-pin PL-2HF analog I/O interface pin assignments and functions.

2.4.4 15-pin Analog I/O Interface

Describes the 15-pin analog I/O interface pin assignments and functions.

2.4.5 DeviceNet Pin Out

Details the pin configuration for the 12 mm 'Micro' connector for DeviceNet interface.

2.5 Remote Digital Interface

Describes digital control and monitoring via RS-232 or RS-422 serial communication.

2.5.1 Communication Configuration

Explains RS-232 and RS-422 communication setup via jumpers and connectors.

2.5.2 RS-422 Bussing

Describes RS-422 bussing capabilities for controlling multiple generators from one point.

2.6 MATCHWORK® Interconnection

Explains the typical interconnection of the generator with DSP-based matching networks.

2.6.1 MATCHWORK® Power Requirements

Details AC input voltage and frequency requirements for matching networks.

2.6.2 AC Power Cable Connections

Specifies pin functions for AC power connections to the matching network.

2.6.3 RF Power Connections

2.6.4 Fiber Optic Control and Debug Cables

2.7 Safety Interlocks

Details the complete interlock system for generator safety and operation.

2.8 Panels and Controls

2.8.1 Front Panel

2.8.3 Rear Panel Connections

2.9 Power Requirements

Specifies AC input voltage and current requirements for the generator.

2.10 Cooling Water Requirements

Outlines the necessary water flow, pressure, and temperature for cooling.

2.10.1 Water Fittings Connection

2.12 System Check

2.13 Initial Power Up

Chapter 3 - GMW-25 Operation

3.1 Basic Operation

Introduces two modes of operation: basic for fixed frequency and advanced for variable frequency.

3.1.1 Generator Operation through the Front Panel

Guides on operating the generator using its front panel controls.

Setting the RF power

Entering the frequency menu

3.1.2 Generator Operation through the ENI Monitor

Guides on operating the generator using the ENI Monitor software.

Changing the requested power

3.1.3 Matching Network Configuration for Generator Control

3.1.4 Matching Network Operation through the Generator

3.1.5 Changing the Matching Network parameters

3.2 ENI Monitor Software Commands

3.3 Advanced Operation

3.3.1 Generator Front Panel Operation

Changing between Auto-Tune and Manual Tune Mode

Setting the Minimum Search Threshold

Setting the delay time

Setting the start frequency

3.4 Remote Control Interface Communication Protocol

3.4.11 Link Integrity Checking

Chapter 4 - Troubleshooting

4.1 Hardware Faults

Lists common hardware issues, probable causes, and recommendations for resolution.

4.2 System Faults

Describes how system faults are displayed and diagnosed using external control devices.

4.3 Analog Remote Interface Faults

Details specific faults related to the analog remote interface, including hard and soft faults.

Appendix A - GMW-25 Specifications