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Newport XPS-Q8 - Page 131

Newport XPS-Q8
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XPS-Q8 Controller Motion Tutorial
All positions are relative to the physical home position of the XYZ group. The data files
must contain the X position = 0, the Y position = 0, and the Z position = 0. The error at
X = Y = Z = 0 must be 0, which means that the error at the home position is 0. This
hardware reference for XYZ mapping has the advantage of being independent of the
value of the HomePreset.
Figure 39 shows the structure for the three mapping files for X, Y, and Z corrections:
XYZMappingCorrectionX.dat: All Err entries are X errors (corrections for X).
XYZMappingCorrectionY.dat: All Err entries are Y errors (corrections for Y).
XYZMappingCorrectionZ.dat: All Err entries are Z errors (corrections for Z).
Figure 39: XYZ Mapping Files.
Err in each compensation file can either be Xerr, Yerr or Zerr.
119 XPSDocumentation V1.4.x (EDH0301En1060 10/17)

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