016 M. Right Mag.: Subdot: M *ENG [-32.00 to 32.00 / - / 0.01dot/step]
017 S. Cor.: 600 Line: M *ENG [-16384 to 16383 / - / 1line/step]
018 S. Cor.: 600 Sub: M *ENG [-1.000 to 1.000 / - / 0.001line/step]
019 S. Cor.: 1200 Line: M *ENG [-16384 to 16383 / - / 1line/step]
020 S. Cor.: 1200 Sub: M *ENG [-1.000 to 1.000 / - / 0.001line/step]
021 Skew: C *ENG
[-5000.000 to 5000.000 / - /
0.001um/step]
029 M. Cor.: Dot: C *ENG [-512 to 511 / - / 1dot/step]
030 M. Cor.: Subdot: C *ENG [-1.00 to 1.00 / - / 0.01dot/step]
033 C. Left Mag.: Subdot: M *ENG [-32.00 to 32.00 / - / 0.01dot/step]
034 C. Right Mag.: Subdot: M *ENG [-32.00 to 32.00 / - / 0.01dot/step]
035 S. Cor.: 600 Line: C *ENG [-16384 to 16383 / - / 1line/step]
036 S. Cor.: 600 Sub: C *ENG [-1.000 to 1.000 / - / 0.001line/step]
037 S. Cor.: 1200 Line: C *ENG [-16384 to 16383 / - / 1line/step]
038 S. Cor.: 1200 Sub: C *ENG [-1.000 to 1.000 / - / 0.001line/step]
039 Skew: Y *ENG
[-5000.000 to 5000.000 / - /
0.001um/step]
047 M. Cor.: Dot: Y *ENG [-512 to 511 / - / 1dot/step]
048 M. Cor.: Subdot: Y *ENG [-1.00 to 1.00 / - / 0.01dot/step]
051 Y. Left Mag.: Subdot: M *ENG [-32.00 to 32.00 / - / 0.01dot/step]
052 Y. Right Mag.: Subdot: M *ENG [-32.00 to 32.00 / - / 0.01dot/step]
053 S. Cor.: 600 Line: Y *ENG [-16384 to 16383 / - / 1line/step]
054 S. Cor.: 600 Sub: Y *ENG [-1.000 to 1.000 / - / 0.001line/step]
055 S. Cor.: 1200 Line: Y *ENG [-16384 to 16383 / - / 1line/step]
056 S. Cor.: 1200 Sub: Y *ENG [-1.000 to 1.000 / - / 0.001line/step]
057 S. Cor.: 600 Sub *ENG [-1.000 to 1.000 / - / 0.001line/step]
Main SP Tables-2
95
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