Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
Power
The indicator is green when power is supplied to the Cirrus unit.
Turbo at Speed
The indicator is amber while the turbo molecular pump accelerates, changing to green when
it has reached normal operating speed.
The filament protect trip is interlocked to this signal to prevent operation of the filament before a
suitable chamber pressure has been obtained.
Capillary Heater
The indicator is amber when the capillary heating element is on.
System Heater
The indicator is amber when the heater temperature is set to 80degC “Heat”, and red when
at the 180degC setting “Bake”.
Please see Section 6.4 for details on baking the chamber.
Emission
The indicator is green when a filament is active and operating correctly.
Comms
This indicator blinks green when communications have been established with the Cirrus
Capillary Inlet
The capillary terminates with a 1/4 inch (6.35mm) stainless steel pipe, ready to couple to a 1/4 inch
Swagelok fitting. You may wish to use a shut off valve to prevent the loss of gas if the capillary needs
to be removed for maintenance.
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