Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
7. Maintenance
Note: These are not operator functions, only competent persons may carry out these operations
7.1 Removing the Cover
Before removing any of the Cirrus covers, ensure the unit is disconnected from the mains
supply and has had adequate time to cool.
To remove the outer cover, remove the three Allen head bolts indicated from front panel.
Remove the two Allen head bolts from either side of the outer cover.
Gently remove the outer cover vertically from the chassis.
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