Spectra MKS Cirrus LM99 - Internal Components Overview

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
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7.2 Internal Components
Before removing the oven top plate, ensure the oven has had adequate time to cool after
baking.
To remove the oven plate, remove the eight Philips screws and lift the plate clear of the oven.
RGA
Chamber
Backing / Bypass
Pump
Cold Cathode
gauge
Capillary
Inlet
Oven
RGA
Electronics
RGA
Electronics
Flexil
Capillary
Heater
Inlet Flange