Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
7.4 Orifice Disk Tools
Orifice disk insertion and removal tools are supplied as part of the Cirrus toolkit. Do not attempt to
remove or insert an orifice disk without using these tools. If they are missing from your toolkit, please
contact you local MKS Spectra facility for replacements.
Clean each tool before use using IPA.
Tool Guide
The “Tool Guide” is fixed to the inlet flange using the three screws supplied, replacing the ceramic
coupling assembly, and acts as the name suggests, as a guide for either the removal or insertion tools.
Removal Tool
The removal tool has a smaller diameter head than the insertion tool, this is to deform the orifice disk
and allow easy removal from the tapered hole into which the orifice disk is fitted.
Insertion Tool
The insertion tool has a head slightly less in diameter than the orifice disk itself, and is used to fit the
orifice disk into the tapered hole.
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