Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
7.7 Fitting a new Orifice Disk
Ensure you have purchased the correct size orifice disk, which should be a 15 Micron, 4-hole array.
P/N. 800010079
Keep the disk in its original packaging until needed.
Do not handle the Orifice Disk, use tweezers gently as not to deform or
scratch the disk.
Offer the new disk to the tapered hole in the inlet flange, this should be done with the Tool Guide
removed, as the disk needs to be offered as squarely as possible to the hole to avoid fouling.
Without disturbing the new Orifice Disk, carefully re-fit the tool guide to the inlet flange.
Once the guide is secured, check again that the new Orifice Disk is lying squarely in the tapered hole.
If not, it must be re-positioned.
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