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Spectra MKS Cirrus LM99 - Page 38

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Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
38
Use the Insertion Tool to push the Orifice Disk into the tapered hole. Some resistance will be felt as the
disk seats into position. There should be a slight gap between the shoulders of the tool guide and the
insertion tool.
Once the disk has been pushed fully home, remove the Insertion Tool and Tool Guide.
Inspect the orifice disk for correct seating, with no gaps visible around the disks edge.
Note: The disk will be slightly cupped after correct fitting.

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