Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
4. Remove the six M6 bolts and washers which fasten the CF35 flange of the analyser to the vacuum
chamber.
5. Carefully withdraw the analyser from the vacuum chamber. Leave the old copper gasket in place
until you are ready to fit the new one, it will help protect the knife edge from accidental damage.
Analyser maintenance is fully described in the next section.
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