Spectra MKS Cirrus LM99 - Exploded View of Analyser (Open Ion-source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
54
9.2 Exploded view of the Analyser (Open ion-source shown)
Item
Description (Dimensions in mm)
Part Number
1
Source Assembly Tungsten Fils
842-021
1
Source Assembly Thoria Fils
842-022
1
PVD Source Assembly Tungsten Fils
842-045
1
PVD Source Assembly Thoria Fils
842-047
2+3
Screw M2 x 4
200902004
1
2
3