Spectra MKS Cirrus LM99 - Filament Plate (Open Ion-source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
55
2
3
4
5
1
6
9.3 Filament Plate (open ion-source)
Item
Description (Dimensions in mm)
Part Number
1
Screw M1.6 x 3 (3 off)
200901603
2
Barrel Connector
305040214
3
Screw M2 x 4
200902004
4
Filament Plate Tungsten Fils
LM508-015PL
4
Filament Plate Thoria Fils
LM508-020PL
5
Filament Screen
305080594
6
Screw M1.6 x 4 (3 off)
200901604