Spectra MKS Cirrus LM99 - Source Assembly (Open Ion-source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
56
9.4 Source Assembly (open ion-source)
Item
Description (Dimensions in mm)
Part Number
1
Plain Washer SS M1.6
27031600
2
Screw M1.6 x 8
200901608
3
Ceramic Tube 2.8D x 3.5L
400020035
4
Ceramic Washer 4.7D x 1L
400010203
5
Repeller Plate Assembly
LM508-018PL
6
Source Plate Assembly
LM508-017PL
2
3
4
5
4
6
4
1