Spectra MKS Cirrus LM99 - Extract Plate (Open Ion-Source)

Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
57
9.5 Extract Plate (open ion-source)
Item
Description (Dimensions in mm)
Part Number
1
Plain Washer SS M1.6
27031600
2
Screw M1.6 x 6
200901606
3
Ceramic Tube 2.8D x 2L
400020020
4
Ceramic Washer 4.7D x 1L
400010203
5
Extract Plate Assembly
LM508-016PL
6
Source Mounting Ring
305080603
2
3
4
5
4
6
1