Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
13.2 UDV
In applications where constant sample pressures across all inlet streams cannot be maintained, ion-
source pressure is regulated by a Pfeiffer UDV140 Regulating Valve and RVG050C Control Unit in
conjunction with an MKS Baratron gauge with a 10V output at 0.1mBar. There may be other types of
gauge used in the future, so adjust your calculations accordingly.
This procedure details the on-site set-up required and should be used in conjunction with the Pfeiffer
Operating Manuals supplied with the UDV and UDV Controller.
Location of key components
Vicci Multi-stream valve controller
MKS Baratron gauge
Vicci Multi-stream valve
Pfeiffer UDV140
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