3
Vacuum System
Vacuum Manifold
Thermo Scientific TSQ Endura and TSQ Quantiva Hardware Manual 27
Vacuum Manifold
The vacuum manifold (Figure 12) encloses the API source interface, ion optics, mass analyzer,
and ion detection system assemblies. The vacuum manifold is a thick-walled, aluminum
chamber with multiple removable top cover plates, various electrical feedthroughs, and gas
inlets.
Tabl e 6 lists the five vacuum regions, the pumps that evacuate them, and the chamber
pressures. The block diagram in Figure 9 shows the vacuum regions.
Vacuum Gauges
The mass spectrometer contains three types of vacuum gauges that measure the pressure in
specific regions of the vacuum manifold. In the Tune application, you can observe the
readback values for the vacuum gauges on the By Function page in the Status pane (under
Vacuum).
• Convection pressure gauge—Measures pressure down to a fraction of a milliTorr (mT).
The instrument uses two convection gauges:
– Source pressure gauge—Measures the pressure in the RF lens and API ion transfer
tube region in the vacuum manifold and the foreline, which connects the triple-inlet
turbomolecular pump and the forepump or forepumps.
– Collision gas pressure gauge—Measures the pressure in the collision cell.
• Ion gauge—Measures the pressure in the analyzer region of the vacuum manifold.
The ion gauge produces energetic electrons that cause the ionization of molecules in the
ion gauge. A collector attracts positive ions formed in the ion gauge. The collector current
is related to the pressure in the vacuum manifold. The ion gauge is also involved in
vacuum protection.
Table 6. Vacuum regions, evacuation devices, and typical pressures
Region Components Evacuated by Pressure
TSQ Endura TSQ Quantiva
1API source N/A Atmosphere
2 RF lens Forepump or forepumps Less than 2 Torr Less than 4.5 Torr
3 MP00 ion optics Triple-inlet turbomolecular pump
(first inlet [molecular drag])
50
mTo r r
4 MP0 ion optics Triple-inlet turbomolecular pump
(second inlet [interstage])
1
mTo rr
5 Mass analyzer Triple-inlet turbomolecular pump
(third inlet [high vacuum])
Less than10
–
5
To r r