3
Vacuum System
Vacuum Manifold
20 Orbitrap Fusion Series Hardware Manual Thermo Scientific
Vent Valve
The solenoid-operated vent valve allows the vacuum manifold to be vented with UHP
nitrogen. The vent valve on the vacuum manifold is closed when the solenoid is energized.
The vacuum manifold vents when the mass spectrometer no longer receives external power, as
with a power failure or when you turn off the main power switch. Power is briefly provided to
the vent valve after losing external power to protect against the accidental loss of power. When
power to the vent valve solenoid shuts off for more than a very brief period of time, the vent
valve opens and the manifold vents nitrogen gas.
Vacuum Manifold
The vacuum manifold (Figure 8) encloses the API source interface, ion optics, mass analyzers,
and ion detection system assemblies. The vacuum manifold is a thick-walled, aluminum
chamber with multiple removable top cover plates, and various electrical feedthroughs and gas
inlets.
Tab le 6 lists the seven vacuum regions, the pumps that evacuate them, and the chamber
pressures. The block diagram in Figure 5 shows the vacuum regions.
IMPORTANT After venting the mass spectrometer, remember to turn off the UHP
nitrogen gas supply.
Table 6. Vacuum regions, evacuation devices, and typical pressures
Region Components Evacuated by Pressure
Orbitrap Fusion Orbitrap Fusion Lumos
1API source N/A Atmosphere
2 RF lens Forepump or forepumps Less than 2 Torr Less than 3 Torr
3 MP00 ion optics Triple-inlet turbomolecular pump
(first inlet [molecular drag])
50 mTorr 100 mTorr
4 MP0 ion optics Triple-inlet turbomolecular pump
(second inlet [interstage])
1 .5 m To rr 3 m To r r
5 Quadrupole mass
analyzer, MP1 ion optics,
IRM, C-trap
Triple-inlet turbomolecular pump
(third inlet [high vacuum])
5×10
–5
Torr
6 LIT mass analyzer and
MP3 ion optics
Single-inlet turbomolecular
vacuum pump
8×10
–5
Torr 2 × 1 0
–5
Torr
7 Orbitrap mass analyzer Single-inlet turbomolecular pump 2 × 10
–10
To r r
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