Thermo Orbitrap Fusion Series - Figure 8. Placement of the Three Turbomolecular Pumps

3
Vacuum System
Vacuum Pumps
22 Orbitrap Fusion Series Hardware Manual Thermo Scientific
As shown in Figure 8, there are three turbomolecular pumps: two triple-inlet pumps that
control the vacuum for multiple vacuum regions and one single-inlet pump that controls the
LIT vacuum region. The turbomolecular pumps also send status information, such as their
temperatures or rotational speeds, to the data system computer.
The Main Power switch turns off the turbomolecular pumps. The electronics service switch
has no effect on these pumps. Power to the turbomolecular pumps automatically shuts off if
the temperatures on the turbomolecular pumps becomes too high.
Figure 8. Placement of the three turbomolecular pumps
Triple-inlet turbomolecular
pump (main)
Triple-inlet turbomolecular
pump (UHV)
Turbomolecular
pump (ion trap)