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14. SWU atmospheric pressure and zero point adjustment
Adjusting the atmospheric pressure of SWU enables more accurate measurements.
Before using a new SWU, or if there is a discrepancy in the indicated value, please
follow the instruction below to adjust it.
14.1. Atmospheric pressure adjustment of ST200-A
The atmospheric pressure adjustment range is about 1.0×10
+4
Pa to 2.0×10
+5
Pa. If it
exceeds this range, the atmospheric pressure adjustment cannot be performed.
Please follow the instructions below to adjust the atmospheric pressure.
① Connect a PC or smartphone to the USB connector of the main unit. Run ATM.ADJUST
on the G-TRAN setting tool "UL-MOBI_Android" or "UL-MOBI_Windows".
※ A password is required to change the settings, as careless setting change may
cause the failure of the vacuum system.
The password can be set to any four numbers.
② Press the filament key of the one channel display unit "ISG1" twice within 1
second.
Please refer to the application manual for details.
Download:
UL-MOBI_Android Google Play
UL-MOBI_Windows https://www.ulvac.co.jp/download/en/application/
UL-MOBI_Windows Instruction manual
https://www.ulvac.co.jp/download/en/application/
14.2. Zero point adjustment of ST200-A
The zero point is automatically adjusted at 1.0×10
-3
Pa or less.
14.3. Adjustment of ST200-R
Enter the command via serial communication.
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