Ulvac GHD-031A - Page 42

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8．Maintenance parts
8.1 Maintenance parts list
Table6. GHD-031 Maintenance parts list
Product name No.
Parts name
Q’ty
15
Outlet valve
2
16
Outlet valve spring
2
22
Check valve
1
24
Oval ring
1
25
Air open valve
1
26
Air open valve spring
1
36
O ring_S-12
1
37
O ring_S-56
1
38
O ring_S-60
1
39
O ring（Casing）
1
40
O ring_P-5
1
41
O ring_P-8
1
42
O ring_P-9
2
43
O ring_P-12.5
1
44
O ring_P-18
1
45
O ring_G-50
1
46
Oil seal _VC-10-20-4
1
47
Oil seal _SC-11-25-7
1
81
O ring_SS040
1
82
O ring_SS110
1
84
Air open route O ring
1
GHD-031
Maintenance kit A
85
O ring_P-20
1
13 1st Vane 2
14 2st Vane 2
18
Oil pump vane
1
27
Oil level gauge
1
GHD-031
Maintenance kit B
32
Inner coupling
1
Note 1: For the relationship between components, see the disassembly drawing.