Installation, Operating & Maintenance Instructions
Series 651 DN 320-400 (I.D. 12“ - 16”), Logic
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
267736ED
2008-02-26
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3.7 Close valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» for details)
Push CLOSE button Send CLOSE VALVE
3.8 Open valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» for details)
Push OPEN button Send OPEN VALVE
3.9 Position control
The valve position is directly controlled according to the position setpoint.
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» and «Analog inputs
and outputs» for details)
1. Set CONTROL MODE to POSITION CONTROL
Select or enter position setpoint
2. Set position SETPOINT
Note: In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher priority.
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» and «Analog inputs
and outputs» for details)
1. Set CONTROL MODE to PRESSURE CONTROL
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