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Versum Materials GASGUARD AP10 User Manual

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© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
VersumMaterialsConfidential
Installation / Operation / Maintenance
Manual
GASGUARD
®
AP10
Source Systems
Manual Part Number: 123223
Edition: Rev-1

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Versum Materials GASGUARD AP10 Specifications

General IconGeneral
ModelGASGUARD AP10
ManufacturerVersum Materials
Gas CompatibilityVarious high-purity gases
Flow RateVaries by application
Purge CapabilityYes
Power Requirements100-240 VAC, 50/60 Hz
Operating PressureVaries by application
DimensionsVaries depending on configuration
WeightVaries depending on configuration