Wentworth Laboratories PEGASUS S200 Series User Manual

Name: Wentworth Laboratories PEGASUS S200 Series
Brand: Wentworth Laboratories
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191 pages

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PEGASUS

Models S200, S200D, S200-PR, S200LSC, 300S, 360S

WAFER PROBING EQUIPMENT

OPERATING AND SERVICE MANUAL

Issue 6.2, July 2011

Software version 6.1 onwards

Part Number 2091-001

The Leader in ProbeAbility ™

Default Chapter4
- Table of Contents4
In this Manual9
Introduction10
1 Specifications12
- Installation Instruction12
- Technical Specifications, Pegasus S200 Series12
2 Controls and Indicators17
- Units17
- Mains Power Control18
- Emergency Stop19
- Power Supply Fault20
3 Operator Interfaces21
- Screen and Function Keys21
- Keypad22
- Joystick23
- Prober Status Indicator24
Operating Instructions25
4 Power-Up and Configuration Screens26
- Power-Up Screen26
- F5 = Shutdown - Starts a Controlled Shutdown, as Described in Chapter27
- Configuration Screen27
5 Run Batch Screen29
- Load Wafer and Choose Alignment Method29
- Alignment Procedures30
- Wafer Centre Wizard36
- Position Reference die36
- Position Central die36
- Position First die37
- Manual Wafer Testing Screen38
- Browse Wafer Screen39
- During Probing39
- After Probing40
- Probing Error Pause Screen41
6 Setup Menu43
- Wafer Size45
- Index45
- Y Index45
- The y Index Parameter Can be Accessed Remotely Using the RYI, RYJ, RYM, WYI, WYJ and WYM Commands45
- X/Y Index Menu45
- Probing Menu49
- Z Lift Menu53
- Tester Menu57
- Inking Menu60
- Remote Menu63
- Prober Options Menu64
7 Change Probe Card Screen71
- Starting71
- Setting the Calliper Position - S200D72
- Set Probing Height72
- Platform Control Screen73
8 Device Options Screen75
- Using Device Files75
- Changing the Active Device75
- Creating a New Device File76
- Other Options76
9 Change Inker Cartridge Screen77
10 Change Probe Height Screen79
11 Program Mode Screen81
- Using Program Mode81
- Running the Active Program81
- Changing the Active Program81
- Editing the Active Program File82
- Training a New Program File83
12 Position Calibration Menu85
- Probing Centre Position(S)85
- Camera Centre Position86
- Loading/Unloading Position87
- Change Probe Card Position87
- Prober Cleaner Wizard88
- Process Validation Position88
- Manual Clean Position89
13 Remote Control Functions91
- Operation in Remote Mode91
- Further Remote Menu Options91
14 Re-Initialisation92
- Z-Axis92
- Stage92
- Platform92
- Pmm92
- Arms93
- Reference Failure Screen93
15 Diagnose95
- Chuck Control95
- Platform Control97
- PMM/CAP Control97
- Robot Control97
- System Options98
- Factory Options98
16 Remote Chip Probing99
- Select and Load Chip Probing Map99
- Load Frame / Wafer100
- Alignment Procedure100
- Position Reference die102
- After Probing102
17 Shutdown103
18 Flying Arm Removal and Replacement104
- Flying Arm Removal104
- Flying Arm Replacement105
- Manual Adjustment of the Flying Arms105
Interconnections and Interfaces106
19 Interconnections107
- Prober Rear Panel107
- Controller Rear Panel109
20 Ttl Tester Interface111
- Inputs and Output111
- Tester Interface Timings115
21 Simple Rs232 / Gpib Tester Interface116
- Prober Generated Events116
- Tester Generated Commands118
- Example Test Sequence118
22 Remote Control Using a Pc120
- Overview120
- INF/SRQ Mode120
- Text Terminator Character120
23 Remote Control by Rs232121
- Connection to PC Serial Communications Port122
24 Remote Control by Gpib (Ieee 488.2)123
25 Remote Command Structure124
- Pegasus Commands124
- Obsolete AWP Commands159
- Prober Status Byte174
- INF Codes175
Servicing Instructions181
26 Servicing183
- Before You Begin183
- Motor Drive Coupling Adjustment (MK2 Only)184
- Cleaning the Controller Air Filter185
- And y Ballscrew Lubrication185
- Chuck Leadscrew Lubrication186
- Planarisation of Chuck188
- Lead Screws191
- Electrical Schematics191

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Wentworth Laboratories PEGASUS S200 Series Specifications

General

Chuck Size	Up to 200 mm
System Type	Manual Probe System
Wafer Size	Up to 200 mm
Type	Analytical Probe Station
Chuck Type	Vacuum Chuck

Wentworth Laboratories PEGASUS S200 Series User Manual

Table of Contents

Questions and Answers:

Wentworth Laboratories PEGASUS S200 Series Specifications