5 Basic Specifications
5.2 Manipulator Clean Specifications
5-2
179394-1CD
HW1483905
MFL15D-875/-1600
5.2 Manipulator Clean Specifications
5.3 Part Names and Working Axes
Fig. 5-1: Part Names and Working Axes
The manipulator conforms to ISO cleanliness class 4
1)
.
1 Under the condition that the manipulator is in the downflow of 0.4 m/s or more
in a vertically rectified state. The parts higher than the wrist flange are
applicable.