v
176183-1CD
HW1483638
Table of Contents
MH5S
(II)/MH5F
11 Parts List ..................................................................................................................................... 11-1
11.1 S-Axis Unit ..................................................................................................................... 11-1
11.2 L-, U-Axes Unit .............................................................................................................. 11-4
11.3 R-Axis Unit..................................................................................................................... 11-7
11.4 Wrist Unit ....................................................................................................................... 11-9