xv
167109-1CD
HW1482308
Contents
MS165
9.4.3 Gas Discharging Procedure .......................................................................... 9-19
9.4.3.1 Necessary Devices................................................................................ 9-19
9.4.3.2 Gas Discharging Procedures
9.4.4 Gas Injecting Procedure ..................................................................................... 9-22
9.4.4.1 Necessary Devices................................................................................ 9-22
9.4.4.2 Gas Injecting Procedures ...................................................................... 9-22
9.5 Notes for Maintenance..................................................................................................... 9-24
9.5.1 Battery Pack Connection .................................................................................... 9-24
10 Recommended Spare Parts........................................................................................................ 10-1
11 Parts List..................................................................................................................................... 11-1
11.1 S-Axis Unit ..................................................................................................................... 11-1
11.2 L-Axis Unit ..................................................................................................................... 11-3
11.3 URBT-Axes Unit ............................................................................................................ 11-6
11.4 U-Arm Unit ..................................................................................................................... 11-8
11.5 Wrist Unit ..................................................................................................................... 11-10
To Next Page
Loading...
