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ACCRETECH UF200R User Manual

ACCRETECH UF200R
104 pages
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FULLY AUTOMATIC
PROBER
UF200
R
UF190
R
USER’S MANUAL
- OPERATION -
TOKYO SEIMITSU CO., LTD.
Before operation, be sure to read this manual and obtain
full knowledge about this device through training.
Keep this manual safely in a specified place.
WARNING
Document No. : FT32000-R001-E0
Date Issued : 2010-05-26

Table of Contents

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ACCRETECH UF200R Specifications

General IconGeneral
BrandACCRETECH
ModelUF200R
CategoryMeasuring Instruments
LanguageEnglish

Summary

Preface

Scope of System Warranty and Liabilities

Warranty Period

Details free and charged service periods.

Scope of Warranty

Lists exclusions from warranty coverage.

Damages and Liabilities

Outlines responsibilities for system use and modifications.

Operation Points and Startup

Appearance

Shows external view of the UF200R system and identifies key components.

EMO and POWER Switches

Explains location and operation of emergency stop and power switches.

Display/Touch Panel Unit

Describes the display screen and its adjustment features.

Head Stage

Details the function and operation of the head stage for probe card attachment.

Storage Media

Describes the USB terminal for data backup and exchange.

Internal Printer (Optional)

Explains the optional internal printer and its feed function.

Loader Unit

Details the cassette elevator and inspection tray operation.

Prober Startup

Outlines the procedure from power-up to prober initialization.

Lot Processing

Screen Display and Operations Prior to Starting Lot Processing

Explains the Prober Status screen and its key buttons.

Device Data Switching

Covers creating, modifying, and switching device data files.

Probe Card Replacement

Details the procedure for replacing the probe card.

Wafer Alignment

Describes the automatic and manual wafer alignment process.

Automatic Probe-Pad Alignment

Setting Control Parameters

Configuring parameters for probe-pad alignment.

Registering Pads

Step-by-step guide for registering pads for alignment.

Pad Alignment

Explains the low and high magnification pad alignment process.

Contact Height Determination

Details methods for determining contact height.

Checking/Correcting Probe Mark Position

Procedures for verifying and adjusting probe marks.

Wafer Mapping & Die Sampling

Operation Flow Chart

Visual representation of the wafer mapping process flow.

Test Die Area Setting

Methods for defining the test area on the wafer.

Reference Die Setting

Procedures for selecting and setting a reference die.

Die Attribute Setting

Assigning attributes (test, skip, mark) to individual dice.

Sampling Dice Setting

Configuring settings for sampling dice during testing.

Operations After Start of Probing

Device Parameter Modifications During Lot Processing

Changing parameters while lot processing is active.

Overdrive Amount Modification

Adjusting the probe tip overdrive amount during operation.

Confirmation and Correction of Probe Mark Position

Verifying and correcting probe mark positions.

Probe Mark Display

Viewing probe mark images on the screen.

Sequence-Back

Resets counters and map for retesting a wafer.

Multi-Pass Probing

Functionality for re-probing a lot or specific dice.

Utility Functions

Wafer Handling

Transferring wafers between cassettes and trays.

TTL Manual Test

Performing manual tests via TTL interface.

GP-IB Communication Data Display

Viewing data transmitted via GP-IB interface.

Map Data Utility

Managing wafer map data files (copy, delete, format).

Date & Time Setting

Setting the prober's internal clock.

Internal Printer Status Display/Switching

Managing the internal printer status and mode.

Cleaning Utility

Executing cleaning cycles or resetting counters.

Task Version

Checking the prober control program version.

Test Count Display

Viewing total, pass, fail, and category counters.

Reject Counter Reset

Resetting counters for fail check and yield.

Data Reference

Checking internal prober program data.

Marker Counter Reset

Checking and resetting marker counters.

Parameter Mask Utility

Hiding or showing parameters on menu screens.

Make User File

Creating user files by selecting Basic Operation parameters.

System Reset

Initializing and restarting the prober system.

APPENDIX Prober Status Display