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UF200R
ACCRETECH UF200R User Manual
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FULL
Y
AUT
OMA
TIC
PROBER
UF200
R
UF190
R
USER’S MANUAL
- OPERA
TION -
T
OKYO SEIMITSU CO.,
L
TD.
Before operation, be sure to read this manual and obtain
full knowledge about this device through training.
Keep this manual safely in a specified place.
W
ARNING
Document No
.
: FT32000-R0
01-E0
Date Issued
: 2010-05-26
2
Table of Contents
Table of Contents
6
Operation Points and Startup
9
Appearance
11
EMO and POWER Switches
12
Display/Touch Panel Unit
13
Head Stage
14
Storage Media
15
Internal Printer (Optional)
16
Loader Unit
17
Prober Startup
18
Lot Processing
19
Screen Display and Operations Prior to Starting Lot Processing
21
Switching the Display with the <Screen Change >Button
22
Switching the Display with the <Screen Change> Button
22
Operation Settings
23
Device Data Switching
24
Saving/Deleting Device Data
26
Probe Card Replacement
27
Wafer Alignment
30
Manual Registartion of Models
32
Manual Registration of Models
32
Manual Alignment
34
Automatic Probe-Pad Alignment
35
Setting Control Parameters
38
Registering Pads
46
Tips on the Pad Registration
48
Pad Alignment
50
Confirming the Pad Alignment Results
52
Contact Height Determination
56
Execution of the Automatic Contact Height Determination
57
Checking/Correcting Probe Mark Position
58
Wafer Mapping & die Sampling
60
Operation Flow Chart
62
Test die Area Setting
63
Setting the Test die Area
65
Reference die Setting
66
Target Sensing
68
Difference between TEG and Corner Targets
70
Setting the Reference die
72
Die Attribute Setting
73
Sampling Dice Setting
75
Performing Data-In for Sample Dice
77
Operations after Start of Probing
78
Device Parameter Modifications During Lot Processing
78
Overdrive Amount Modification
81
Confirmation and Correction of Probe Mark Position
82
Probe Mark Display
83
Sequence-Back
84
Multi-Pass Probing
85
Tips for Multi-Pass Probing
87
Operation Setting for Multi-Pass Probing
90
Operation Settings for Multi-Pass Probing
90
Utility Functions
91
Wafer Handling
93
Ttlmanual Test
94
TTL Manual Test
94
GP-IB Communication Data Display
94
Map Data Utility
95
Date & Time Setting
95
Internal Printer Status Display/Switching
95
Cleaning Utility
96
Task Version
96
Test Count Display
97
Reject Counter Reset
97
Data Reference
97
Marker Counter Reset
98
Parameter Mask Utility
98
Make User File
99
System Reset
100
4
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ACCRETECH UF200R Specifications
General
Brand
ACCRETECH
Model
UF200R
Category
Measuring Instruments
Language
English
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