PREFACE
i
PREFACE
This User’s Manual for Operation explains the operation procedures for Fully Automatic Prober
UF200R running on System Software Ver. S5.0U-P2.
In addition to standard functions, this manual also covers common optional functions (either
with or without the “Optional” note). For this reason, it should be noted that some of the
descriptions in this manual may not apply to your particular system, depending on its
configuration.
Prepared by : Prober System Group, Hachioji Plant, Tokyo Seimitsu Co., Ltd.
Published by : Tokyo Seimitsu Co., Ltd.
First edition issued : May 26, 2010
Reproduction of this document, either physically or electronically, in part or whole without prior
consent from Tokyo Seimitsu Co., Ltd. is strictly prohibited.
Copyright 2010, TOKYO SEIMITSU CO., LTD.