11 Reliability
11.23 EM Vstress[2]: Electromigration test, voltage stressed, 2 SMUs (A.01.20)
[Supported Analyzer]
B1500A
[Description]
Performs the Electromigration (EM) test, and plots the stress time vs resistance characteristics. This test is
performed by the sampling measurement mode as shown below.
1. applies stress voltage
2. performs measurement and saves measurement data
3. calculates the device failure time
[Device Under Test]
Wiring device, 2 terminals
[Device Parameters]
D: Wiring pattern length
W: Wiring pattern width
Temp: Temperature (deg C)
[Test Parameters]
IntegTime: Integration time
TotalStressTime: Total stress time
StopCondition: Measurement stop condition (%changes of wire resistance)
Port1: SMU connected to Port1, constant voltage output
Port2: SMU connected to Port2, constant voltage output
V1Stress: Port1 stress voltage
[Extended Test Parameters]
V2: Port2 voltage
I1Limit: Port1 current compliance
HoldTime: Hold time
Port1MinRng: Minimum range for Port1 current measurement
[User Function]
Wiring resistance value R=Vport1/Iport1
[Test Output: X-Y Graph]
X axis: Accumulated stress time TimeList
Y1 axis: Port1 current Iport1List
Y2 axis: Wiring resistance value RList
Y3 axis: Offset from initial resistance value DeltaRList
[Test Output: List Display]
Accumulated stresss time TimeList
Port1 current Iport1List
Wiring resistance value RList
Offset from initial resistance value DeltaRList
[Test Output: Parameters]
FailureTime: Time to failure
Agilent EasyEXPERT Application Library Reference, Edition 8
11-55
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