15 Structure
15.10 Ig-Vg Iforce: MOS capacitor Ig-Vg characteristics, current sweep
(A.01.20)
[Supported Analyzer]
B1500A, 4155B, 4155C, 4156B, 4156C
[Description]
Measures gate current vs gate voltage (Ig-Vg) characteristics of MOS capacitor gate insulator.
[Device Under Test]
MOS capacitor
[Device Parameters]
Polarity: Nch (SMUs force the specified value) or Pch (SMUs force the negative specified value).
Lg: Gate length
Wg: Gate width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
Gate: SMU connected to Gate terminal, primary sweep current output
IgStart: Sweep start current for Gate terminal
IgStop: Sweep stop current for Gate terminal
VgLimit: Gate voltage compliance
Subs: SMU connected to Substrate, constant voltage output
Vsubs: Substrate voltage
[Extended Test Parameters]
HoldTime: Hold time
DelayTime: Delay time
SubsMinRng: Minimum range for the substrate current measurement
[Measurement Parameters]
Gate voltage Vgate
Substrate current Isubs
[User Function]
IgatePerArea: Gate current per unit gate area IgatePerArea=Igate/Lg/Wg
IsubsPerArea: Substrate current per unit gate area IsubsPerArea=Isubs/Lg/Wg
[X-Y Plot]
X axis: Gate current Igate (LOG)
Y1 axis: Gate voltage Vgate (LINEAR)
Agilent EasyEXPERT Application Library Reference, Edition 8
15-20
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