15 Structure
15.23 Rdiff-V: Diffusion resistor R-V characteristics (A.01.20)
[Supported Analyzer]
B1500A, 4155B, 4155C, 4156B, 4156C
[Description]
Measures the resistance vs voltage characteristics (R-V characteristic).
[Device Under Test]
Diffusion resistor, 3 terminals
[Device Parameters]
Polarity: Ntype (SMUs force the specified value) or Ptype (SMUs force the negative specified value).
L: Resistor length
W: Resistor width
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
Port1: SMU connected to resistor, primary sweep voltage output
V1Start: Primary sweep start voltage
V1Stop: Primary sweep stop voltage
V1Step: Primary sweep step voltage
I1Limit: Port1 current compliance
Subs: SMU connected to substrate, secondary sweep voltage output
VsubsStart: Secondary sweep start voltage
VsubsStop: Secondary sweep stop voltage
VsubsStep: Secondary sweep step voltage
IsubsLimit: Subs current compliance
Port2: SMU connected to resistor, constant voltage output
[Extended Test Parameters]
V2: Port2 output voltage
HoldTime: Hold time
DelayTime: Delay time
Port1MinRng: Minimum range for the port1 current measurement
[Measurement Parameters]
Port1 measurement current I1
[User Function]
Resistance R=V1/I1
Sheet resistance Rsheet=R*W/L
[X-Y Graph]
X axis: Port1 output voltage V1 (LINEAR)
Y1 axis: Resistance R (LINEAR)
Y2 axis: Port1 measurement current I1 (LINEAR)
[List Display]
Port1 output voltage V1
Port1 measurement current I1
Resistance R
Sheet resistance Rsheet
Agilent EasyEXPERT Application Library Reference, Edition 8
15-40
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