Agilent Technologies EasyEXPERT

15 Structure
15.30 VanDerPauw Square: Van Der Pauw pattern sheet resistance (A.01.11)
[Supported Analyzer]
B1500A, 4155B, 4155C, 4156B, 4156C
[Description]
Measures the sheet resistance of the Van Der Pauw pattern, and plots the sheet resistance vs input current
characteristics.
[Device Under Test]
Van Der Pauw pattern, 4 terminals
[Device Parameters]
Temp: Temperature
[Test Parameters]
IntegTime: Integration time
Port1: SMU connected to pattern, primary sweep current output
I1Start: Sweep start current
I1Stop: Sweep stop current
I1Step: Sweep step current
V1Limit: Port1 voltage compliance
Port2: SMU connected to pattern, constant voltage output
VM1: SMU connected to pattern, constant current output
VM2: SMU connected to pattern, constant current output
[Extended Test Parameters]
V2: Port2 output voltage
IM1: VM1 output current
IM2: VM2 output current
HoldTime: Hold time
DelayTime: Delay time
[Measurement Parameters]
VM1 measurement voltage Vm1
VM2 measurement voltage Vm2
[User Function]
Voltage between terminals DeltaV=Vm1-Vm2
Sheet resistance Rsheet=(3.141592/log(2))*(DeltaV/I1)
[X-Y Graph]
X axis: Port1 output current I1 (LINEAR)
Y1 axis: Voltage between terminals DeltaV (LINEAR)
Y2 axis: Sheet resistance Rsheet (LINEAR)
[List Display]
Port1 output current I1
Voltage between terminals DeltaV
Sheet resistance Rsheet
Agilent EasyEXPERT Application Library Reference, Edition 8
15-50