Agilent Technologies EasyEXPERT

17 Utility
17.8 QSCV C Offset Meas: Offset capacitance measurement (A.03.00)
[Supported Analyzer]
B1500A, B1505A, 4155B, 4155C, 4156B, 4156C
[Description]
Measures the offset capacitance of the cables and DUT interface by using the QSCV method when
measurement terminals are open.
[Device Under Test]
MOS capacitance, 2 terminals
[Device Parameters]
Polarity: Nch (SMUs force the specified value) or Pch (SMUs force negative specified value)
Lg: Gate length
Wg: Gate width
Temp: Temperature
[Test Parameters]
IMeasSMU: SMU to measure current and capacitance, connected to Gate terminal or Substrate terminal
MeasRange: Current measurement range used for the QSCV measurement, fixed range
Integ_C: Integration time for the capacitance measurement
Integ_L: Integration time for the leakage current measurement
HoldTime: Hold time
DelayTime: Delay time
[Extended Test Parameters]
StepDelay: Step delay time
[Measurement parameters]
Capacitance C
[List Display]
Capacitance C
Agilent EasyEXPERT Application Library Reference, Edition 8
17-10