22 IGBT
22.10 Vth Vge(off): IGBT Vth or Vge(off) measurement (A.04.00)
[Supported Analyzer]
B1505A
[Description]
Measures Ic-Vge characteristics and extracts threshold voltage or cutoff voltage.
[Device Under Test]
IGBT, 3 terminals
[Device Parameters]
Polarity: Nch (SMUs force the specified value) or Pch (SMUs force the negative specified value).
Temp: Temperature
[Test Parameters]
Memo: Memorandum
Gate: SMU connected to Gate terminal, primary sweep voltage output
VgStart: Sweep start voltage for Gate terminal
VgStop: Sweep stop voltage for Gate terminal
VgStep: Sweep step voltage for Gate terminal
Collector: SMU connected to Collector terminal
Vc: Collector voltage
Emitter: GNDU connected to Emitter terminal
Ic@Vth_Vgeoff: Collector current to decide Vth or Vge(off)
MeasMode: Measurement parameter, Vth or Vgeoff
IntegTime: Integration time
IcLimit: Collector current compliance
[Extended Test Parameters]
IgLimit: Gate current compliance
HoldTime: Hold time
DelayTime: Delay time
IcZero: Y axis (Icollector) minimum value
IcMinRange: Minimum range for the collector current measurement
IgMinRange: Minimum range for the gate current measurement
[Measurement Parameters]
Collector current Icollector
Gate current Igate
[User Function]
Ta: Temperature Ta=Temp
[Analysis Function]
In case of Vth measurement,
Vth=@MX (X coordinate of Marker)
In case of Vge(off) measurement,
Vgeoff=@MX (X coordinate of Marker)
[Auto Analysis]
Marker: Icollector=Ic@Vth_Vgeoff
Agilent EasyEXPERT Application Library Reference, Edition 8
22-21