Alcatel Vacuum Technology adixen ACC 2009 - User Manual

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Cold Cathode/Pirani Gauge ACC 2009
Manual reference:
113159
Edition: 03 - Date: 09/2010
6/15Alcatel Vacuum Technology France - User’s Manual ACC 20095/15Alcatel Vacuum Technology France - User’s Manual ACC 2009
Measurement principle
Thermal conduction (Pirani)/cold cathode
ionization - inverted magnetron (Penning)
Measurement range
5x10
–9
…1000 mbar
Accuracy
5x10
–9
…1.10
–8
mbar, ±50%
1x10
–8
…100 mbar ±30%
100…1000 mbar ±50%
Repeatability (with ambiant temperature 25 °C)
1x10
–8
…100 mbar ± 5%
Supply Voltage range 15…30 V DC
Tolerance ripple > 2 Vpp
Power consumption 2 W (current <150 mA)
Protection IP40
Gauge identifi cation resistance 18 k
Ω in Pirani mode,
15 kΩ in cold cathode mode
Nominal fi lament resistance
(ambient temperature 25 °C)
56 to 58
Ω
Analog output (versions 0-10 V + SP) 0-10 V ; 8.6 V = 1000 mbar
1.8 V = 5x10
–9
mbar
Set point 2 dry contacts - 1 A 30 V DC
Interface (model RS485 + SP) RS485
Electrical connection D-sub 9 Pin (Male)
Max. cable length 300 m - 1mm
2
Temperature range Operation +5 to +55 °C
Storage –20 to +70 °C
Filament temperature 120 °C
Bake out temperature 150 °C without any electronic
Relative humidity 70 % without any condensation
Vacuum connection DN25 ISOKF, DN40 ISOKF, DN40CF-F
Operating position Any orientation
Internal volume 18.3 cm
3
Receivable maximum pressure
2 bars
Materials exposed to vacuum Molybdenum, SUS304, SUS430 Tungsten,
AL
2
O
3
, Fe / Ni+Ni-planting, Glass, FPM
Filament material Tungsten (W)
Cold Cathode/Pirani Gauge
ACC 2009
User’s Manual
Alcatel Vacuum Technology France - 98, avenue de Brogny - BP 2069 - 74009 Annecy cedex - FRANCE
Tel. (33) 4 50 65 77 77 - Fax. (33) 4 50 65 77 89
Web site: www.adixen.com
Realization: Axess - www.axess-groupe.com - Publication: Alcatel - P/N: 113159 - Ed 03- Date: 09/2010
Connecting flange:
DN 25 ISO KF X = 16 mm
DN 40 ISO KF X = 16 mm
DN 40 CF-F X = 35.5 mm
Pin Signal
ACC 2009
0/10 V +SP RS485 + SP
1 Analog output 0-10 V (+)
X
RS485 signal (+)
X
2 Set point (COM)
XX
3 Not used
4 DC power input (+)
XX
5 Gauge ID
XX
6 Set point (1)
XX
7 Set point (2)
XX
8 Analog output 0-10 V (–)
X
RS485 signal (–)
X
9 DC Power input (O V) (–)
XX
1
2
3
4
5
6
7
8
9
Gauge
identificate
resistance
Protective earth
+
–
SP1
SP COM
SP2
24 V DC
Analog out (+)
Analog out (–)
1
2
3
4
5
6
7
8
9
RS485 (+)
+
–
RS485 (–)
SP1
SP COM
SP2
24 V DC
Gauge
identificate
resistance
Protective earth
ACC 2009 - 0/10 V + SP ACC 2009 - RS485 + SP
1
2
3
Panel description
ACC 2009 - 0/10 V + SP ACC 2009 - RS485 + SP
100
70
70
X
The ACC2009 is a combination of a Pirani and a cold cathode
(Penning) gauge. The crossover between the gauges occurs at a
fixed set point as shown below:
The POWER Led indicates the
gauge in operation:
- flashing = ‘Pirani’ gauge in
operation, rough vacuum.
- steady = cold cathode gauge
in operation, high vacuum.
Measurement
principle
Cold cathode
Decreasing pressure
Increasing pressure
Pirani
10
–3
mbar
5.10
–9
mbar 1.10
3
mbar
10
–2
mbar
Safety . . . . . . . . . . . . . . . . . . . . . . . . . .p. 2
Responsibility and Warranty . . . . . . . . . .p. 3
Accessories . . . . . . . . . . . . . . . . . . . . . .p. 3
Technical Data . . . . . . . . . . . . . . . . . . . .p. 4 and 5
Gauge Installation . . . . . . . . . . . . . . . . .p. 6
Operation . . . . . . . . . . . . . . . . . . . . . . .p. 7 to 11
Gauge Removal . . . . . . . . . . . . . . . . . . .p. 11
Maintenance . . . . . . . . . . . . . . . . . . . . .p. 12 and 13
Returning the Products . . . . . . . . . . . . . .p. 13 and 14
Decontamination and Product Recycling . .p. 14
Declaration of Conformity . . . . . . . . . . . .p. 15
Contents
The combination Cold cathode (Penning) /Pirani gauge ACC2009
has been designed for vacuum measurements of gases in the
pressure range of 1000 mbar to 5 x 10
-9
mbar.
It is an active gauge. The gauges of 0/10V can be operated with
an Adixen controller (ACS 2000 or ACM2000) or as a stand alone
gauge sending a signal directly to other equipment. The gauges of
RS485 type can be operated only with RS485 customer’s equipment.
This gauge must not be used for measuring fl ammable or combustible
gases which react in air.
Symbols used
This type of warning is used to indicate a potential risk that can
cause serious injury or death if instructions are not followed.
This type of warning is used to indicate an imminent risk that can
cause serious injury or death if instructions are not followed.
This type of warning is used to indicate a potential risk that can
cause significant damage to the equipment and/or installations if
instructions are not followed.
1 - Safety
General instructions
 Use an Appropriate Power Source
Do not use this gauge with a power supply over 30V DC.
Disregarding this maximum voltage can cause product damage or
personnel injury.
 Use appropriate grounds
An appropriate protective ground connection is mandatory to
avoid electric shock in the event of a fault. Make sure there is no
difference in protective ground potential between gauge head and
controller device / power supply.
 Use Caution when installing this gauge.
Check that there are no harmful gasses or vapors within the lines
or chambers before opening them to install this gauge. Clean and
purge with a clean dry gas to remove these harmful gasses or
vapors if necessary.
 Do not over pressure
Do not pressurize the inside of this gauge beyond the receivable
maximum pressure. Disregarding this can lead to either damage to
this gauge, or a gas leakage which may cause personnel injury.
 Do not use this gauge for corrosive or toxic gasses
Do not use this gauge with corrosive, toxic, flammable or explosive
gasses, as this can lead to gas leakage and cause injury.
 Maintenance of the product
Do not disassemble the gauge head or electronics sub-assembly.
Refer to section 8 for sub-assembly replacement Instructions.
 Do not modify the product
Do not modify the electrical or mechanical components of this
gauge. Any modification could cause damage or personnel injury.
 Skilled personnel
All work described in this document should be carried out only
by qualified persons who have suitable technical training and the
necessary experience.
The end-user assumes the responsibility in conjunction withe the
process gases used.
- fails to observe the instructions in this document,
- uses this product in a way that is not consistent with the
manufacturer’s intended use,
- modifies this product in any way whatsoever,
- uses the product with accessories not listed in the product
documentation,
Gauge failures due to contamination, as well as expendable
parts (filament), are not covered by the warranty.
2 - Responsibility and Warranty
3 - Accessories
Description P/N
Gauge cable length (5 m)
112752
Gauge cable length (10 m)
112753
Gauge cable length (20 m)
112754
“D-Sub“ 9P (female)
connector (for custom
equipment connections)
114848
Specifications
4 - Technical data
Gauges dimensions
4 - Technical Data (ctd)
Electrical Connections
 Do not use or apply voltage or ground to the pins marked “not used”.
 Select the correct wire size for voltage if you use your own cable
( 4 p. 4)
(1)
.
 Always connect the protective ground wires or an electric shock can result.
 Install a circuit breaker on the power source. Disregarding these
instructions can cause damage and/or injury.
(1) ”D-Sub” 9P (female) connector is available to allow the gauge
to be connected directly to customer equipment. (
3 p. 3).
Connect the gauge to the installation using appropriate fitting
accessories (1) (from the Adixen product catalog).
Connect the cable (2). Use cable ties or other methods to support
the cable so that its weight does not put excessive strain on the
connector (3).
5 - Gauge Installation
Connection
 Do not touch the inside surfaces of this gauge with bare hands,
especially the inlet flange. Fingerprints will increase outgassing in
the gauge and cause erroneous pressure readings.
 Install this gauge on the vacuum system with care. If it is
necessary to reposition it, do not twist or bend the sensor by the
electronic enclosure. Disconnect the gauge, position it in the correct
position, and connect it again.
 Install this gauge away from vibration. High vibration can cause
the gauge to malfunction.
 This gauge is designed to operate in any orientation. Install the
gauge horizontally for higher accuracy.
Install this gauge away from drastic temperature changes (away
from any heat sources or fans) for higher accuracy.
 Do not exceed the receivable maximum pressure ( 4 p. 4). If
the maximum pressure of the gauge is exceeded, it can lead to gas
leakage and cause injury.
 Do not open the installation on which a gauge is installed when
the internal pressure is above 1 bar. Internal components may be
ejected and cause personal injury.
 Do not use this gauge with corrosive, toxic, flammable or
explosive gasses.
 Do not heat this gauge beyond 70 °C. Disregarding this instruction
can cause damage to the gauge circuits or a vacuum leak.
6 - Operation
Lighting: Off / Steady / Flashing
State Description
Power LED
green
Pirani gauge in operation
green cold cathode in operation
orange adjustment in progress
ou
red
fault (see error catalog)
SP1 LED set point 1 opened
green set point 1 closed
orange or orange
adjustment in progress (
6 p. 10)
SP2 LED
set point 2 opened
green set point 2 closed
orange or orange
adjustment in progress (
6 p. 10)
Switch Description
VAC/ATM
atmosphere and zero adjustment
SP SEL set point adjustment
Switch selector
ACC 2009 - 0/10 V + SP
use to enter set point data (
6 p. 10)
ACC 2009 - RS485 + SP use to enter network address
(refer to RS485 Communication Manual)
Intended Use: The Cold Cathode/Pirani Gauge ACC 2009 has been
designed for vacuum measurement of gases in the pressure range of
5X10
-9
...1000 mbar. The gauge must not be used for measuring fl am-
mable or combustible gases which react in air.
English original version

Summary

Safety Precautions

Responsibility and Warranty

Product Accessories

Technical Specifications

Gauge Dimensions and Connecting Flanges

Provides physical dimensions and flange types for the gauge.

Electrical Connection Pinouts

Details pin assignments for different gauge models and wiring.

Gauge Installation Guide

Operation

Measurement Principle: Pirani and Cold Cathode

Describes the combined Pirani and cold cathode measurement principle.

Control Panel and LED Indicators

Explains the function of LEDs and switches on the gauge panel.

Analog Signal Output (0-10 V)

Details the analog output signal and its conversion to pressure.

RS485 Communication Interface

Explains the RS485 signal output and communication details.

Gauge Reading Adjustments (ATM;VAC)

Describes the process for adjusting Pirani gauge readings at ATM and VAC.

Setting Up Set Points (SP1;SP2)

Guides on configuring set points 1 and 2 using the switch selector.

Set Point Output Relay

Explains the set point relay output and its hysteresis.

Gauge Removal Procedure

Product Maintenance and Troubleshooting

Checking the Pirani Filament

Instructions for checking the resistance of the Pirani filament.

Sub-assembly Replacement Procedure

Detailed steps for replacing gauge sub-assemblies like sensor or electronics.

Troubleshooting: Error Catalog

Lists common error codes, probable causes, and recommended actions.

Returning the Products

Decontamination and Product Recycling

Declaration of Conformity

Overview

1. Function Description
2. Important Technical Specifications
3. Usage Features
4. Maintenance Features
5. Safety and Environmental Considerations

The Adixen ACC 2009 is a Cold Cathode/Pirani Gauge designed for vacuum measurements, combining both Pirani (thermal conduction) and cold cathode (inverted magnetron/Penning ionization) principles. This active gauge is capable of measuring pressures in the range of 1000 mbar down to 5 x 10⁻⁹ mbar. It is suitable for use with an Adixen controller (ACS 2000 or ACM2000) or as a standalone unit, directly outputting a signal to other equipment. RS485 type gauges are exclusively operated with RS485 customer equipment. The device is not intended for measuring flammable or combustible gases that react in air.

Function Description:

The ACC 2009 gauge measures vacuum pressure by utilizing two distinct principles: Pirani for higher pressures and cold cathode for lower pressures. The gauge automatically transitions between these two measurement modes at a fixed set point. The Pirani gauge operates in the rough vacuum range, while the cold cathode gauge handles high vacuum. The device provides an analog output signal (0-10V) for pressure readings and offers RS485 communication for specific models. It also includes two dry contact set points for control applications.

Important Technical Specifications:

• Measurement Principle: Thermal conduction (Pirani) and cold cathode ionization (inverted magnetron/Penning).
• Measurement Range: 5 x 10⁻⁹ to 1000 mbar.
• Accuracy: ±50% from 5 x 10⁻⁹ to 1 x 10⁻⁸ mbar; ±30% from 1 x 10⁻⁸ to 100 mbar; ±50% from 100 to 1000 mbar.
• Repeatability (at 25 °C): ±5% from 1 x 10⁻⁸ to 100 mbar.
• Supply Voltage Range: 15-30 V DC.
• Power Consumption: 2 W (current < 150 mA).
• Protection: IP40.
• Gauge Identification Resistance: 18 kΩ in Pirani mode, 15 kΩ in cold cathode mode.
• Nominal Filament Resistance (25 °C): 56 to 58 Ω.
• Analog Output (0-10 V + SP versions): 0-10 V, where 8.6 V = 1000 mbar and 1.8 V = 5 x 10⁻⁹ mbar.
• Set Point: 2 dry contacts, 1 A 30 V DC.
• Interface (RS485 + SP models): RS485.
• Electrical Connection: D-sub 9 Pin (Male).
• Max. Cable Length: 300 m - 1 mm².
• Temperature Range: Operation: +5 to +55 °C; Storage: -20 to +70 °C.
• Filament Temperature: 120 °C.
• Bake Out Temperature: 150 °C (without electronics).
• Relative Humidity: 70% (without condensation).
• Vacuum Connection: DN25 ISOKF, DN40 ISOKF, DN40CF-F.
• Operating Position: Any orientation (horizontal recommended for higher accuracy).
• Internal Volume: 18.3 cm³.
• Receivable Maximum Pressure: 2 bars.
• Materials Exposed to Vacuum: Molybdenum, SUS304, SUS430 Tungsten, AL₂O₃, Fe / Ni+Ni-plating, Glass, FPM.
• Filament Material: Tungsten (W).

Usage Features:

The ACC 2009 features a panel with LED indicators and a switch selector for operation and adjustments.

• Power LED: Indicates gauge status: flashing green for Pirani operation (rough vacuum), steady green for cold cathode operation (high vacuum), orange for adjustment in progress, and red for fault.
• SP1/SP2 LEDs: Indicate set point status (opened/closed) and adjustment progress.
• VAC/ATM Switch: Used for atmosphere and zero adjustment.
• SP SEL Switch: Used for set point adjustment.
• Switch Selector (ACC 2009 - 0/10 V + SP): Used to enter set point data (mantissa and exponent values, and measurement units like mbar, torr, or Pascal).
• Switch Selector (ACC 2009 - RS485 + SP): Used to enter network address (refer to RS485 Communication Manual).
• Analog Signal Output: The 0-10V output can be converted to pressure using the formula P = 10^(1.667x U-d), where P is pressure, U is analog signal voltage, and d is a constant specific to the unit (Pa, mbar, or Torr).
• Gas Conversion Factors: For gases other than Air, O₂, N₂, or CO, pressure readings under 1 mbar should be multiplied by a conversion factor provided in a table.
• Set Point Output: The set point relay output has a fixed 10% hysteresis.
• ATM/VAC Adjustments: Allows restoring stored ATM or VAC values. The Pirani gauge can be adjusted at atmospheric pressure and at its low pressure limit (VAC). The gauge automatically detects the conditions. For zero adjustment, the gauge pressure must be below 1 x 10⁻⁴ mbar. These adjustments are performed using the ATM/VAC switch and holding it. There is no adjustment for the cold cathode gauge. For RS485 models, adjustments can be made via the RS485 interface.
• Set Point Setup: Set points 1 and 2 can be modified using the switch selector to set the mantissa, exponent, and measurement units.

Maintenance Features:

• Cleanliness: It is crucial to keep the gauge clean to prevent increased outgassing and erroneous pressure readings. Only denatured alcohol should be used to clean the outside of the gauge. The inside surfaces, especially the inlet flange, should not be touched with bare hands.
• Sub-assembly Replacement: The sensor and/or electronics can be replaced. This involves loosening a set screw, pulling out the sensor, replacing the component, aligning holes, pushing the sensor back in, and securing it. After replacement, the sensor must be calibrated.
• Maintenance Kit: A maintenance kit (P/N 113042) and a trigger kit (P/N 118808) are available, containing items like springs, Pirani gauge components, O-rings, anodes, and triggers.
• Checking the Filament: The Pirani filament can be checked by removing the sensor from the electronics and using an ohmmeter to measure its resistance between the Pirani sensor pin and its ground spring. If the resistance is outside the 56-58 Ω range, the sensor should be replaced.
• Error Catalog: The manual provides an error catalog with Power LED and voltage indications, controller messages, probable errors, and recommended actions (e.g., checking/replacing sensor head, replacing electronics).
• Replacement Procedure (for sensor components): Detailed steps are provided for disassembling the sensor, cleaning its interior components (screen, circlip, disk) with isopropyl alcohol and lint-free wipes, and reassembling it using parts from the maintenance kit. After reassembly, the sensor should be tested for leaks and evacuated for one hour before calibration.

Safety and Environmental Considerations:

• Power Source: Use only a power supply not exceeding 30V DC.
• Grounding: Proper protective ground connection is mandatory.
• Installation: Ensure no harmful gases or vapors are present in lines or chambers before installation. Clean and purge with a clean dry gas if necessary.
• Pressure Limits: Do not exceed the maximum receivable pressure (2 bars) to prevent damage or gas leakage.
• Gas Compatibility: Do not use with corrosive, toxic, flammable, or explosive gases.
• Temperature Limits: Do not heat the gauge beyond 70 °C (operation) or 150 °C (bake out without electronics).
• Modification: Do not modify electrical or mechanical components.
• Personnel: All work must be carried out by qualified and experienced personnel.
• Contamination: Parts on a vacuum system can be contaminated. Before removal, confirm if the gauge is contaminated with harmful substances. If contaminated, purge and clean thoroughly. Take precautions when handling contaminated parts.
• Product Return: Contaminated products must be cleaned and declared free of harmful substances before returning to the manufacturer. A "Safety Questionnaire" must be completed.
• Decontamination and Recycling: In compliance with EU directives (2002/96/CE and 2002/9/CE), Adixen products at the end of their service life must be returned for decontamination and reuse. Components should be separated according to material and contamination level for proper disposal or recycling.

Alcatel Vacuum Technology adixen ACC 2009 Specifications