1/15Alcatel Vacuum Technology France - User’s Manual ACC 2009 2/15Alcatel Vacuum Technology France - User’s Manual ACC 2009 3/15Alcatel Vacuum Technology France - User’s Manual ACC 2009 4/15Alcatel Vacuum Technology France - User’s Manual ACC 2009
7/15Alcatel Vacuum Technology France - User’s Manual ACC 2009
Cold Cathode/Pirani Gauge ACC 2009
Manual reference:
113159
Edition: 03 - Date: 09/2010
6/15Alcatel Vacuum Technology France - User’s Manual ACC 20095/15Alcatel Vacuum Technology France - User’s Manual ACC 2009
Measurement principle
Thermal conduction (Pirani)/cold cathode
ionization - inverted magnetron (Penning)
Measurement range
5x10
–9
…1000 mbar
Accuracy
5x10
–9
…1.10
–8
mbar, ±50%
1x10
–8
…100 mbar ±30%
100…1000 mbar ±50%
Repeatability (with ambiant temperature 25 °C)
1x10
–8
…100 mbar ± 5%
Supply Voltage range 15…30 V DC
Tolerance ripple > 2 Vpp
Power consumption 2 W (current <150 mA)
Protection IP40
Gauge identifi cation resistance 18 k
Ω in Pirani mode,
15 kΩ in cold cathode mode
Nominal fi lament resistance
(ambient temperature 25 °C)
56 to 58
Ω
Analog output (versions 0-10 V + SP) 0-10 V ; 8.6 V = 1000 mbar
1.8 V = 5x10
–9
mbar
Set point 2 dry contacts - 1 A 30 V DC
Interface (model RS485 + SP) RS485
Electrical connection D-sub 9 Pin (Male)
Max. cable length 300 m - 1mm
2
Temperature range Operation +5 to +55 °C
Storage –20 to +70 °C
Filament temperature 120 °C
Bake out temperature 150 °C without any electronic
Relative humidity 70 % without any condensation
Vacuum connection DN25 ISOKF, DN40 ISOKF, DN40CF-F
Operating position Any orientation
Internal volume 18.3 cm
3
Receivable maximum pressure
2 bars
Materials exposed to vacuum Molybdenum, SUS304, SUS430 Tungsten,
AL
2
O
3
, Fe / Ni+Ni-planting, Glass, FPM
Filament material Tungsten (W)
Cold Cathode/Pirani Gauge
ACC 2009
User’s Manual
Alcatel Vacuum Technology France - 98, avenue de Brogny - BP 2069 - 74009 Annecy cedex - FRANCE
Tel. (33) 4 50 65 77 77 - Fax. (33) 4 50 65 77 89
Web site: www.adixen.com
Realization: Axess - www.axess-groupe.com - Publication: Alcatel - P/N: 113159 - Ed 03- Date: 09/2010
Connecting flange:
DN 25 ISO KF X = 16 mm
DN 40 ISO KF X = 16 mm
DN 40 CF-F X = 35.5 mm
Pin Signal
ACC 2009
0/10 V +SP RS485 + SP
1 Analog output 0-10 V (+)
X
RS485 signal (+)
X
2 Set point (COM)
XX
3 Not used
4 DC power input (+)
XX
5 Gauge ID
XX
6 Set point (1)
XX
7 Set point (2)
XX
8 Analog output 0-10 V (–)
X
RS485 signal (–)
X
9 DC Power input (O V) (–)
XX
1
2
3
4
5
6
7
8
9
Gauge
identificate
resistance
Protective earth
+
–
SP1
SP COM
SP2
24 V DC
Analog out (+)
Analog out (–)
1
2
3
4
5
6
7
8
9
RS485 (+)
+
–
RS485 (–)
SP1
SP COM
SP2
24 V DC
Gauge
identificate
resistance
Protective earth
ACC 2009 - 0/10 V + SP ACC 2009 - RS485 + SP
1
2
3
Panel description
ACC 2009 - 0/10 V + SP ACC 2009 - RS485 + SP
100
70
70
X
The ACC2009 is a combination of a Pirani and a cold cathode
(Penning) gauge. The crossover between the gauges occurs at a
fixed set point as shown below:
The POWER Led indicates the
gauge in operation:
- flashing = ‘Pirani’ gauge in
operation, rough vacuum.
- steady = cold cathode gauge
in operation, high vacuum.
Measurement
principle
Cold cathode
Decreasing pressure
Increasing pressure
Pirani
10
–3
mbar
5.10
–9
mbar 1.10
3
mbar
10
–2
mbar
Safety . . . . . . . . . . . . . . . . . . . . . . . . . .p. 2
Responsibility and Warranty . . . . . . . . . .p. 3
Accessories . . . . . . . . . . . . . . . . . . . . . .p. 3
Technical Data . . . . . . . . . . . . . . . . . . . .p. 4 and 5
Gauge Installation . . . . . . . . . . . . . . . . .p. 6
Operation . . . . . . . . . . . . . . . . . . . . . . .p. 7 to 11
Gauge Removal . . . . . . . . . . . . . . . . . . .p. 11
Maintenance . . . . . . . . . . . . . . . . . . . . .p. 12 and 13
Returning the Products . . . . . . . . . . . . . .p. 13 and 14
Decontamination and Product Recycling . .p. 14
Declaration of Conformity . . . . . . . . . . . .p. 15
Contents
The combination Cold cathode (Penning) /Pirani gauge ACC2009
has been designed for vacuum measurements of gases in the
pressure range of 1000 mbar to 5 x 10
-9
mbar.
It is an active gauge. The gauges of 0/10V can be operated with
an Adixen controller (ACS 2000 or ACM2000) or as a stand alone
gauge sending a signal directly to other equipment. The gauges of
RS485 type can be operated only with RS485 customer’s equipment.
This gauge must not be used for measuring fl ammable or combustible
gases which react in air.
Symbols used
This type of warning is used to indicate a potential risk that can
cause serious injury or death if instructions are not followed.
This type of warning is used to indicate an imminent risk that can
cause serious injury or death if instructions are not followed.
This type of warning is used to indicate a potential risk that can
cause significant damage to the equipment and/or installations if
instructions are not followed.
1 - Safety
General instructions
Use an Appropriate Power Source
Do not use this gauge with a power supply over 30V DC.
Disregarding this maximum voltage can cause product damage or
personnel injury.
Use appropriate grounds
An appropriate protective ground connection is mandatory to
avoid electric shock in the event of a fault. Make sure there is no
difference in protective ground potential between gauge head and
controller device / power supply.
Use Caution when installing this gauge.
Check that there are no harmful gasses or vapors within the lines
or chambers before opening them to install this gauge. Clean and
purge with a clean dry gas to remove these harmful gasses or
vapors if necessary.
Do not over pressure
Do not pressurize the inside of this gauge beyond the receivable
maximum pressure. Disregarding this can lead to either damage to
this gauge, or a gas leakage which may cause personnel injury.
Do not use this gauge for corrosive or toxic gasses
Do not use this gauge with corrosive, toxic, flammable or explosive
gasses, as this can lead to gas leakage and cause injury.
Maintenance of the product
Do not disassemble the gauge head or electronics sub-assembly.
Refer to section 8 for sub-assembly replacement Instructions.
Do not modify the product
Do not modify the electrical or mechanical components of this
gauge. Any modification could cause damage or personnel injury.
Skilled personnel
All work described in this document should be carried out only
by qualified persons who have suitable technical training and the
necessary experience.
The end-user assumes the responsibility in conjunction withe the
process gases used.
- fails to observe the instructions in this document,
- uses this product in a way that is not consistent with the
manufacturer’s intended use,
- modifies this product in any way whatsoever,
- uses the product with accessories not listed in the product
documentation,
Gauge failures due to contamination, as well as expendable
parts (filament), are not covered by the warranty.
2 - Responsibility and Warranty
3 - Accessories
Description P/N
Gauge cable length (5 m)
112752
Gauge cable length (10 m)
112753
Gauge cable length (20 m)
112754
“D-Sub“ 9P (female)
connector (for custom
equipment connections)
114848
Specifications
4 - Technical data
Gauges dimensions
4 - Technical Data (ctd)
Electrical Connections
Do not use or apply voltage or ground to the pins marked “not used”.
Select the correct wire size for voltage if you use your own cable
( 4 p. 4)
(1)
.
Always connect the protective ground wires or an electric shock can result.
Install a circuit breaker on the power source. Disregarding these
instructions can cause damage and/or injury.
(1) ”D-Sub” 9P (female) connector is available to allow the gauge
to be connected directly to customer equipment. (
3 p. 3).
Connect the gauge to the installation using appropriate fitting
accessories (1) (from the Adixen product catalog).
Connect the cable (2). Use cable ties or other methods to support
the cable so that its weight does not put excessive strain on the
connector (3).
5 - Gauge Installation
Connection
Do not touch the inside surfaces of this gauge with bare hands,
especially the inlet flange. Fingerprints will increase outgassing in
the gauge and cause erroneous pressure readings.
Install this gauge on the vacuum system with care. If it is
necessary to reposition it, do not twist or bend the sensor by the
electronic enclosure. Disconnect the gauge, position it in the correct
position, and connect it again.
Install this gauge away from vibration. High vibration can cause
the gauge to malfunction.
This gauge is designed to operate in any orientation. Install the
gauge horizontally for higher accuracy.
Install this gauge away from drastic temperature changes (away
from any heat sources or fans) for higher accuracy.
Do not exceed the receivable maximum pressure ( 4 p. 4). If
the maximum pressure of the gauge is exceeded, it can lead to gas
leakage and cause injury.
Do not open the installation on which a gauge is installed when
the internal pressure is above 1 bar. Internal components may be
ejected and cause personal injury.
Do not use this gauge with corrosive, toxic, flammable or
explosive gasses.
Do not heat this gauge beyond 70 °C. Disregarding this instruction
can cause damage to the gauge circuits or a vacuum leak.
6 - Operation
Lighting: Off / Steady / Flashing
State Description
Power LED
green
Pirani gauge in operation
green cold cathode in operation
orange adjustment in progress
ou
red
fault (see error catalog)
SP1 LED set point 1 opened
green set point 1 closed
orange or orange
adjustment in progress (
6 p. 10)
SP2 LED
set point 2 opened
green set point 2 closed
orange or orange
adjustment in progress (
6 p. 10)
Switch Description
VAC/ATM
atmosphere and zero adjustment
SP SEL set point adjustment
Switch selector
ACC 2009 - 0/10 V + SP
use to enter set point data (
6 p. 10)
ACC 2009 - RS485 + SP use to enter network address
(refer to RS485 Communication Manual)
Intended Use: The Cold Cathode/Pirani Gauge ACC 2009 has been
designed for vacuum measurement of gases in the pressure range of
5X10
-9
...1000 mbar. The gauge must not be used for measuring fl am-
mable or combustible gases which react in air.
English original version
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