Brooks Automation MagnaTran 7.1 User Manual (English)

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Brooks Automation

MagnaTran™ 7.1

User’s Manual

MN-003-1600-00 Revision 2.2

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Table of Contents3
Figures15
Tables19
Changes23
Introduction25
Magnatran 7 Robot Overview26
Special Features27
Operation Overview28
Documentation Overview29
Supplementary and Related Documentation30
Manual Notation31
Hardware Notation31
Software Notation32
Document and Drawing Numbering33
Notes, Cautions, Warnings, and Pictograms34
Manual Usage35
Specifications36
Robot Drive36
Standard Arms39
Company Overview41
Quality Policy41
Vision Statement41
Business Profile41
Safety44
Safety Considerations44
Personnel Safety Guidelines44
Equipment Safety Guidelines45
Disconnect Devices and Interlocks47
Disconnect Devices47
Interlocks47
Lockout/Tagout47
Mechanical Hazards48
Electrical Hazards49
Electrical Hazard Classifications50
Laser Hazards51
Gas Hazards52
Chemical Hazards53
Thermal Hazards54
Vacuum Hazards55
Fire and Explosion Hazards56
Environmental Hazards57
Noise Emission57
Vibration57
Matrix of Emergency and Corrective Response Actions58
Material Safety Information59
Helium Safety Information60
Isopropyl Alcohol Safety Information61
Nitrogen Safety Information62
Krytox ® (Dupont) Safety Information63
Installation65
Site Requirements66
Space66
Environmental Requirements69
Electrical69
Communications69
Unpacking and Inspection70
Unpacking Instructions71
Unpacking and Inspection71
Installation Procedure72
Prepare Surface for Mounting72
Robot Installation74
Facilities Connections74
Electrical Connections74
Communication Connections78
Control/Display Module81
Software Installation83
Check-Out84
Mechanical Checks84
Facility Checks84
Initial Power-Up Sequence85
Configuration Compatibility86
Mount the Arm Set87
Mount the Magnatran 7 Leapfrog Arm Set88
Mount the Magnatran 7.1 Bisymmetrik Arm Set/Hub Style93
Mount Magnatran 6 Bisymmetrik Arm Set98
Mount the Magnatran 6 Frogleg Arm Set102
Mount the Magnatran 7 Bisymmetrik Arm Set/Cone Style106
Install End Effector111
Alignment and Calibration112
Subsystems113
Mechanical System114
Subsystems114
Protective Covers115
Frame Assembly116
T1/T2 Drive Assembly117
Z Axis Drive Assembly119
Robot Arms121
Electrical System123
PC104 CPU (Supervisor) Board123
Personality (Motion Control Computer) Board123
T1/T2 Axis Driver Board and Z Axis Driver Board123
I/O (Interface) Board124
Power Pak127
Power Supply127
Software128
Control/Display Module129
Functional Block Diagram130
Operational Interfaces134
Interface Overview134
Power Connections135
Serial Communication SIO1137
Switch Settings139
Serial Communication SIO2140
MISC I/O Communications141
High Side I/O142
Low Side I/O144
High Side/Low Side Interfaces146
Safety Interlock149
Retract Pin150
Marathon Express I/O151
Control/Display Module152
Emergency Stop CDM152
Optional CDM153
Operation155
Magnatran 7.1 Wafer Handling Robot Overview156
Arm Description156
Magnatran 7.1 Application Number162
Theory of Operation163
Single Arm Motion164
Dual Arm Motion164
Motion Control167
Speed167
Hardware Memory Structure170
Station Coordinate System171
Factory Set HOME Position173
HOME Operation174
Controls and Indicators175
Overview175
Controls175
Indicators175
Operational Interlocks177
Identification177
Creating the Operational Interlocks180
Related Commands180
Pass through Feature180
Special Notes on the Powerpak181
Mapping the Interlocks183
Wafer Presence Sensors-Extend and Retract186
Overview186
Wafer PICK187
Wafer PLACE190
Sensor Interface Specifications191
Ex/Re Sensor Commands191
Wafer Presence Sensors- Radial Motion192
R_MT Wafer Sensing Technique192
R_MT Placement Criteria192
R_MT Commands193
Radial Motion Setup Procedure195
Off Center PICK and PLACE Feature196
Discrete I/O Control (DIO)199
DIO Control System199
DIO Control Programming199
Initial DIO Configuration Procedure199
DIO Fault Conditions199
DIO Start-Up200
DIO Signal Definitions200
Enable DIO Initialization Sequence210
Robot Motion DIO Inhibition210
PASIV™ Safety Feature Operation212
The Workspace Overview212
Creating Workspaces213
Reserved Workspace Names214
Defining Tmin and Tmax216
Assigning an Interlock to a Workspace216
PASIV™ Commands216
Control/Display Module (CDM) Operation217
Power Control217
Control Modes220
Key Descriptions221
Left Column Keys223
Axis Parameter Selection Keys232
Moving in the Menu Tree234
Entering Data Values234
Setting up Stations235
Example of Teaching a Station with the CDM236
Powerpak Power Fault Manager238
Operation238
Controls and Indicators239
Operational Interlocks240
Start-Up241
Operational Check-Out241
Normal Running242
A Sample Session242
Emergency Conditions243
Issuing a HALT Command in Background Mode243
Issuing an Emergency off (EMO)243
Issuing an EMER_STOP in DIO Mode243
Issuing a STOP in CDM Mode243
Issuing an EMERGENCY STOP on the CDM Mode244
Shut-Down245
Alignment and Calibration247
Robot Alignment248
Required Tools and Test Equipment248
Alignment Strategy249
Alignment Procedure250
Verifying Flatness of Robot's End Effector251
Adjusting the Robot's End Effector253
Setting the Robot to the Wafer Transport Plane259
Setting the Transfer and Process Modules' T and R Coordinates262
Teaching Arm B of the Dual Arm Sets264
Teach Arm B Procedure I264
Teach Arm B Procedure II265
Final Checkout266
Verify Proper PICK and PLACE of Wafer266
Command Reference269
Description270
Robot Operation270
Command Flows270
Operating Modes272
Command and Response Structure274
Response Types and Syntax277
Command and Response Compatibility279
Command Quick Reference Tables281
Command Reference282
Check Load292
Configure Robot Application293
Create Workspace294
DIO Start295
DIO Stop296
EEPROM Reset297
Find Encoder298
Find Phase299
Find Zero300
Go to301
Go to Station with Offset304
Halt307
Hllo308
Home309
Life Test311
Map316
Map Pass through317
Mount319
Move320
Pick323
Pick with an Offset324
Place 5328
Place with an Offset329
Reference332
Release333
Remove IO334
Remove Station335
Remove Workspace336
Request Background337
Request Capture338
Request Communication339
Request Configuration342
Request DIO Output343
Request History344
Request Home Position Z-Axis347
Request Interlock348
Request I/O Echo349
Request I/O Map350
Request I/O State352
Request Load354
Request Load Mode356
Request Mount357
Request Position Absolute358
Request Position Destination360
Request Position Station362
Request Position Target364
Request Radial Motion Sense366
Request Reference368
Request Retract 2 Value369
Request Revision370
Request Robot Application371
Request Station372
Request Station Option374
Request Station Sensor376
Request Sync Phase378
Request Sync Zero379
Request Version380
Request Warning CDM Status381
Request Who382
Request Workspace383
Request Workspace Autocreate384
Request Workspace Mode385
Reset386
Set Arms387
Set Capture388
Set Communication389
Set DIO Output393
Set High Speed394
Set Home Position Z-Axis395
Set Interlock396
Set I/O Echo397
Set I/O State398
Set Load400
Set Load Mode402
Set Low Speed403
Set Medium Speed404
Set Mount405
Set Radial Motion Sense406
Set Retract 2 Value407
Set Station408
Set Station Option410
Set Station Option VIA Point413
Set Station Sensor415
Set Sync Phase417
Set Sync Zero418
Set Teach Speed419
Set Warning CDM Status420
Set Workspace421
Set Workspace Autocreate422
Set Workspace Mode423
Set Z-Brake424
Store Communication425
Store DIO Output427
Store Home Position Z-Axis428
Store I/O Echo429
Store Load Mode430
Store Radial Motion Sense431
Store Retract 2 Value432
Store Station433
Store Station Option435
Store Station Sensor437
Store Sync Phase438
Store Sync Zero439
Store Warning CDM Status440
Store Workspace441
Store Workspace Autocreate442
Store Workspace Mode443
Transfer444
Transfer with an Offset445
Error Code Reference447
Error Listings for the Magnatran 7 Robot447
Success Codes447
Station Errors447
User I/O - Command Parser Errors447
Station Setup Errors448
Robot Internal Errors449
Dispatcher/Communications Errors449
Robot Wafer Sensor Errors450
Configuration Errors452
Monitor Errors453
Inclusion Zones (Workspace) Errors454
Motion Command Task Errors455
Real Time Clock Errors455
Comm Port Driver456
System Task (Kernel) Related Errors456
Non-Volatile Memory Errors456
Mail System Related Errors456
Monitor Trace Error Codes456
System Initialization and Error Log Errors457
Robot Motion Control Processor Errors457
Maintenance and Repair461
Preventive Maintenance Schedule462
Schedule462
Parts463
Data Log464
Ball Screw Inspection466
Encoder and Motor Coil Cables Inspection468
Cover Inspection469
Wrist Band Inspection470
Pads on End Effectors Inspection471
Connection Inspection472
Robot Cleaning Procedure473
End Effector Pad Cleaning Procedure475
O-Ring Removal/Replacement/Cleaning477
End Effector Alignment480
Power Pak Maintenance481
Repair Philosophy482
Facilitated Field Repair482
Depot Field Repair483
Priority Parts Service483
Brooks Factory Repair Services483
Repair Procedures484
Robot Removal/Replacement485
Arm Removal/Replacement487
End Effector Replacement490
End Effector Pad Removal/Replacement492
Robot Calibration Procedure496
Personality Board Replacement497
Wrist Band Adjustment499
T1/T2 Axis Driver Board Replacement501
Z-Driver Board Replacement503
Z Encoder Replacement505
I/O Board Replacement508
Z Home Flag Sensor Board Replacement Procedure510
Z Hard Stop and Overtravel Limit Switch Adjustment513
Fuse Replacement516
PC 104 CPU Board Replacement518
Power Pak Replacement523
Encoder Setup527
Motor Electrical Phase Calibration530
Restore the Home Position to the Factory Settings531
Reset the Home Position to the User Preference533
Reset Stations When the Home Position Is Reset535
Resetting Mount Position536
Uploading and Downloading Station Values537
Control/Display Module Resetting541
Firmware Upgrade543
Troubleshooting547
Troubleshooting Overview548
Communication Related Issues550
Power Related Issues552
Radial Motion Related Issues554
Theta Motion Related Issues556
Z Motion Related Issues558
Find Phase Related Issues561
Home Z Axis Related Issues564
Operational Interlock Related Issues566
Repeatability Related Issues569
Power Pak Related Issues570
Station Value/Orientation Related Issues572
Z Brake Binding Test574
Determine if the Z Axis Is Configured Properly Via Software575
Z Binding Test Using the Trace Command576
Position Repeatability Test579
Verifying "Arm State" of Magnatran 7580
Verifying Robot Calibration Parameters581
Checking for FET Short Circuits on the Theta Driver Board582
Checking for FET Short Circuits on the Z Driver Board583
Appendices585
Appendix B: Tooling587
Appendix C: Torque Settings588
Appendix D: Robot Compatibility589
Command Comparison590
Error Code Comparison595
Appendix E: User Setting Tables601
Appendix F: Relay I/O Option608
Illustrated Parts Catalog616
List of Attachments632
Wiring Diagrams632
Glossary638
Index650
Reader's Comments656

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Brooks Automation MagnaTran 7.1 Specifications

General

Brand	Brooks Automation
Model	MagnaTran 7.1
Category	Industrial Equipment
Language	English

Brooks Automation MagnaTran 7.1 User Manual

Table of Contents

Brooks Automation MagnaTran 7.1 Specifications