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5850EM
Brooks Instrument 5850EM User Manual
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Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Brooks
®
Models 5964, 5850EM
Brooks
®
Models 5964, 5850EM
Mass Flow Controllers
Model 5850EM
Mass Flow Controller
with D-Connector
Model 5850EM Downported
Mass Flow Controller
with Card Edge
Model 5964
Mass Flow Controller
with D-Connector
2
Table of Contents
Default Chapter
5
Table of Contents
5
Section 1 Introduction
7
Description
7
How to Use this Manual
7
Specifications
8
Figures
11
MFC/MFM Dimensional Drawing for Model 5964/5850EM with D-Connector and VCR Fittings
11
MFC/MFM Dimensional Drawing for Model 5964/5850EM with Card Edge and VCR Fittings
12
MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector
13
MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge
14
Section 2 Installation
15
General
15
Receipt of Equipment
15
Recommended Storage Practice
15
Return Shipment
16
Transit Precaution
16
Removal from Storage
16
In-Line Filter
17
Installation
17
Electrical Interface
18
Operation Procedure
19
Card Edge Connector
20
D-Connector Shielded Cable Hookup Diagram - Voltage I/O Version
20
Pin Card Edge Connector Ribbon Cable Hookup Diagram
21
D-Connector Shielded Cable Hookup Diagram - Current I/O Version
22
Common Electrical Hookups Current I/O Version
23
Section 3 Operation
25
Overview
25
Connections and Controls
25
Theory of Operation
25
Model 5964/5850EM Components
26
Flow Sensor Operational Diagram
29
TM End Connections Shown)
29
Features
30
Enhanced Response 20 Pin Card Edge PC Board Jumper Location and Function
31
Adjustment Potentiometers
33
Enhanced Response 15 Pin D-Connector PC Board Jumper Location and Function
33
Standard Response 15 Pin D-Connector PC Board Jumper Location and Function
34
Current I/O Version PC Board Jumper Location and Function
35
Command Steps, Soft Start Disabled
36
Adjustment Potentiometer Location
39
Zero Adjustment
40
Calibration Procedure
41
Bench Troubleshooting Circuit
41
Response Adjustment
46
Response Adjustment
47
Section 4 Maintenance
51
Overview
51
Troubleshooting
52
Gas Conversion Factors
52
Orifice Sizing
60
Example Nomograph
64
Restrictor Sizing
65
Brooks ® Models 5964, 5850EM
67
4
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Brooks Instrument 5850EM Specifications
General
Brand
Brooks Instrument
Model
5850EM
Category
Controller
Language
English
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