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Canon ANELVA M-332MX User Manual

Canon ANELVA M-332MX
14 pages
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Questions and Answers:

Canon ANELVA M-332MX Specifications

General IconGeneral
BrandCanon
ModelANELVA M-332MX
CategoryMeasuring Instruments
LanguageEnglish

Summary

A-NET Crystal Ion Gauge M-332MX Operation Manual

Safety

General Safety Precautions

General warnings and cautions regarding potential injury or equipment damage.

Power Disconnection Requirements

Disconnect power before opening controller case or attaching/detaching gauge head.

Input Power Specifications

Use input power within DC 22-26V and do not reverse polarity.

Vacuum Gauge Guarantee

Guarantee Terms and Conditions

Details on repair/replacement eligibility and exclusions like mishandling or unauthorized repairs.

Service Contact Information

Instructions to contact Canon Anelva's Field Service Division for failures.

Crystal Ion Gauge M-332MX Outline

Specifications

Table 1 Specifications

Lists technical specifications including model, ranges, power, and operating conditions.

Part Names and Functions

Table 2 Part Names and Functions

Identifies components like connectors, LEDs, controls, and the gauge head.

Table 3 LED Operation

Explains the meaning of LED status indicators (green, red, flashing) for crystal and B-A gauges.

Part Dimensions

Figure 1 Crystal Gauge M-322XG Dimensions

Provides dimensional drawings and specifications for the gauge head and controller.

Unpacking and Checking

Components List

Lists all items included in the product package for verification.

Connecting to External Instruments

Remote I/O Connector Pin Layout

Details the D-Sub 15-pin connector pinout and their associated functions.

Remote Control Input

Explains the remote control input signals for B-A filament, degas, and crystal gauge adjustments.

Input Signal Use Example

Illustrates how to use the FIL ON/OFF input signal with an external circuit.

Analog Output

Describes the analog signal output for pressure measurement and its conversion equation.

Replacing the Gauge Head

Detaching the Gauge Head

Instructions on how to detach the gauge head, including loosening a screw.

Attaching the Gauge Head

Steps for correctly attaching the gauge head, aligning guides, and securing it.

Adjusting the Crystal Gauge Unit

Zero Adjustment

Procedures for adjusting the zero point using a switch or remote input.

Automatic Zero Adjustment

Automatic zero point adjustment linked with B-A gauge operation.

ATM Adjustment

Procedure for adjusting the ATM pressure using a standard gauge and volume control.

Troubleshooting

Table 6 Troubleshooting

Lists LED indicators, display states, and corresponding causes of error and actions.

Figure 3 Crystal LED Error Flashing

Visual guide to understanding crystal LED error flashing patterns.

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