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CRYO-TORR 4F
CTI-CRYOGENICS CRYO-TORR 4F User Manual
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C
HELIX
TECHNO
LOGY CO
RPORAT
ION
-
TI
C
R
Y
OG
E
N
I
C
S
HELIX TECHNOLOGY CORPORATION
http://w
ww
.helix
technolog
y
.com
Cryo-T
orr
®
High-V
acuum Pump Installation,
Operation and Maintenance Instructions
8040613
Rev
. A (4/2001)
2
Table of Contents
Default Chapter
3
Table of Contents
3
Section 1 - Cryo-Torr Cryopump Description
5
Introduction
5
Installation, Operation, and Service Instructions
5
Appendix A - Customer Support Centers
6
Figure 1-1: Cryo-Torr High-Vacuum Pumps
6
Figure 1-2: Cryo-Torr High-Vacuum Pumps
7
Specifications
8
Table 1-1: Cryo-Torr 4F Cropump Specifications
8
Table 1-2: Cryo-Torr 8 Cryopump Specifications
9
Table 1-3: Cryo-Torr 8F Cryopump Specifications
10
Table 1-4: Cryo-Torr 10 Cryopump Specifications
11
Table 1-5: Cryo-Torr 100 Cryopump Specifications
12
Table 1-6: Cryo-Torr 250F Cryopump Specifications
13
Table 1-7: Cryo-Torr 400 Cryopump Specifications
14
Table 1-8: Cryo-Torr 500 Cryopump Specifications
15
Theory of Operation
16
Cold Head
16
Vacuum Vessel and Arrays
16
Figure 1-3: Cutaway View of a Typical Cryo-Torr High-Vacuum Pump
17
Compressor Gas and Oil Flows
18
Cryo-Torr Interface
18
Figure 1-4: Cryo-Torr Interface
18
Figure 1-5: Typical Cryo-Torr System with 9000 Series Compressor
19
Figure 1-6: Typical Cryo-Torr System with 8200 Compressor
20
Section 2 - Installation
21
Introduction
21
Installation
21
Figure 2-1: Block Diagram for Cryo-Torr System Installation
21
Vent Pipe Connection
22
Roughing Pump Connection
23
Figure 2-2: Gas and Electrical Component Location on a Typical
24
Helium Return and Supply Line Connections
25
Power Cable Connection
25
Crossover Pressure Calculations
26
Cryo-Torr Cryopump
26
Table 2-1: Crossover Values
26
Cryo-Torr Cryopump Capacity Calculations
27
Optimizing Crossover Pressure
27
Table 2-2: Condensable Gases Capacity (Argon, Nitrogen, Oxygen, Etc.)
27
Crossover Cycle Calculations
28
Cryopump Shutdown Procedure
29
Cryopump Start-Up Procedure
29
Cryopump Storage
30
Section 3 - Regeneration
31
Introduction
31
When to Regenerate
31
Assisted Regeneration
32
Table 3-1: Required Accessories for Assisted Regeneration
32
Section 4 - Troubleshooting
34
Troubleshooting the Cryopump
34
Technical Inquiries
34
Table 4-1: Troubleshooting Procedures
35
Section 5 - Maintenance Procedures
37
Helium Circuit Decontamination
37
Cryo-Torr Cryopump Decontamination Procedures
37
Cleaning the Cryo-Torr Cryopump
39
Table 5-1: Indium Gasket Screw Torque Specifications
40
Table A-1: Customer Support Centers
42
4
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CTI-CRYOGENICS CRYO-TORR 4F Specifications
General
Brand
CTI-CRYOGENICS
Model
CRYO-TORR 4F
Category
Water Pump
Language
English
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