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Pump Type | Turbo Molecular Pump |
---|---|
Vacuum | High Vacuum |
Applications | Thin film deposition, research and development |
Target Materials | Metals, Oxides |
Substrate Size | Up to 4" diameter, depending on the model |
Deposition Method | Sputtering |
Cooling System | Water Cooling |
Provides an overview of the Denton Vacuum DESK V Cold Sputter/Etch Unit's purpose and basic components.
Highlights critical safety warnings and explains common safety symbols used in the manual.
Provides instructions for unpacking the unit and information on the emergency stop button.
Guides on setting voltage, connecting power, and gas inlets for system installation.
Covers pre-start-up checks and the procedure to power on and operate the system.
Lists common faults, probable causes, and recommended actions for system issues.