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Denton Vacuum DESK V User Manual

Denton Vacuum DESK V
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Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 1
Desk V
DESK V - SPUTTER/ETCH UNIT AND ACCESSORIES
DENTON VACUUM, LLC
1259 N. CHURCH STREET
MOORESTOWN, NJ 08057
PHONE: 856-439-9100
FAX: 856-439-9111
WWW.DENTONVACUUM.COM
DENTONVACUUM
DESKV
Desk V
Desk V TSC
Watch the Desk V videos here:
https://www.youtube.com/user/Dentonvacuum

Table of Contents

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Denton Vacuum DESK V Specifications

General IconGeneral
Pump TypeTurbo Molecular Pump
VacuumHigh Vacuum
ApplicationsThin film deposition, research and development
Target MaterialsMetals, Oxides
Substrate SizeUp to 4" diameter, depending on the model
Deposition MethodSputtering
Cooling SystemWater Cooling

Summary

INTRODUCTION AND SYSTEM OVERVIEW

GENERAL DESCRIPTION

Provides an overview of the Denton Vacuum DESK V Cold Sputter/Etch Unit's purpose and basic components.

SAFETY AND UNPACKING PROCEDURES

SAFETY WARNINGS AND SYMBOLS

Highlights critical safety warnings and explains common safety symbols used in the manual.

UNPACKING AND EMERGENCY STOP BUTTON

Provides instructions for unpacking the unit and information on the emergency stop button.

INSTALLATION AND INITIAL SETUP

INSTALLATION INSTRUCTIONS

Guides on setting voltage, connecting power, and gas inlets for system installation.

INITIAL START-UP AND INSPECTION

Covers pre-start-up checks and the procedure to power on and operate the system.

OPERATING PROCEDURES AND MODES

MAINTENANCE AND TROUBLESHOOTING

TROUBLESHOOTING GUIDE

Lists common faults, probable causes, and recommended actions for system issues.