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Diener femto User Manual

Diener femto
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OPERATING
INSTRUCTIONS
Type: Femto
Please read this manual carefully before installing the
machine.
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Table of Contents

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Diener femto Specifications

General IconGeneral
BrandDiener
Modelfemto
CategoryLaboratory Equipment
LanguageEnglish

Summary

OPERATING INSTRUCTIONS

Summary Of Delivered Components

1. Delivered Components and Description

1.1 Cabinet / Basic Unit

Describes different types of basic units and their physical dimensions.

1.2 Gas Supply

Details gas supply options, including needle valves and MFCs.

1.3 Connections

Explains electrical and gas connections for different basic unit types.

1.4 Vacuum Chamber

Describes vacuum chamber configurations, materials, and cleaning procedures.

1.5 Carrier

Details different types of carriers for plasma processes.

1.6 Electrodes

Describes various electrode types and their applications.

1.7 Controls

Explains the software controls for operating the plasma machine.

1.8 Generator

Details specifications and types of generators used with the system.

1.9 Vacuum pump

Provides information on different vacuum pump types and their specifications.

1.10 Options

Lists and describes optional features and accessories for the plasma system.

2. Connecting The Machine

4. Safety Guidelines

Voltage

Precautions related to high voltage and proper power connection.

Damp Rooms

Warning against using the machine in moist environments.

Short Circuit

Guidance on preventing electrical short circuits involving electrodes.

Thermic Endanger

Caution regarding hot electrodes during operation.

Process Gas

Safety checks and prohibitions related to process gases.

Gas Ballast

Instructions for using the gas ballast valve with oxygen.

Exhausts

Requirements for safe routing of exhaust gases.

Aggressive Liquids

Warning about aggressive liquids damaging needle valves.

Power Plug

Safety instructions for handling the power plug and connections.

Animals

Prohibition of encasing animals in the plasma system.

Contaminations

Advice on avoiding dust and debris to prevent machine damage.

Maintenance and Repair

Guidelines for maintenance, oil changes, and authorized repairs.

5. Maintenance

5.1 Pump

Daily checks and manual reference for pump oil level and change intervals.

5.2 Safety Components

Semi-annual checks for components like door switch and vacuum switch.

5.3 Cleaning

Instructions for cleaning the machine exterior and chamber.

5.4 Seals

Procedure for cleaning door seals daily and changing them semi-annually.

5.5 Electrode Retainer

Testing electrode retainer for leaks and checking plasma color.

6. Troubleshooting

7. Spare Part List Femto

8. EC-Declaration of Conformity

9. Warranty

10. Information According Plasma Processes

10.1 Parameters

General guidance on process parameters for standard systems.

10.2 Materials

Considerations for material sensitivity to heat, UV, and gases.

10.3 Spread of Plasma

Visual examples of plasma spread in different configurations.

10.4 Pressure of gas bottle

Checking gas bottle pressure and regulator settings.

10.5 Selection of gases

Guidance on selecting appropriate gases and pressure regulators.

10.6 Gas piping

Information on connecting gas lines using Swagelok fittings.

10.7 Gas bottle safety guideline

Safety recommendations for handling and storing gas bottles.

10.8 Gas consumption

Overview of gas consumption based on machine type and flow rates.

10.9 Gas correction factor (GKF)

How to set gas correction factors in the PRS software.

10.10 Process parameters in general

Adjustable parameters like process duration, gas, pressure, and power.

10.10.1 Cleaning

Detailed parameters for cleaning various materials.

10.10.2 Activation

General and specific parameters for material activation processes.

10.10.3 Etching

Parameters for etching metals, plastics, glass, and ceramics.

10.10.4 Coating via plasma polymerization

Processes for coating materials via plasma polymerization.