DISCO DAD321 - Page 12

Contents-2
CONTENTS
C. MACHINE COMPONENTS
AND FUNCTIONS............................................ C-1
1. Machine Outer Cover ...........................................................................C-2
2. Axis Section .........................................................................................C-5
2-1. Axis Arrangement ..........................................................................................C-6
2-2. X-axis Section................................................................................................C-7
2-3. Y-axis Section................................................................................................C-9
2-4. Z-axis Section.............................................................................................. C-11
2-5. θ-axis Section ..............................................................................................C-13
2-6. Microscope Section .....................................................................................C-16
2-7. Spindle-axis Section ....................................................................................C-17
3. Main Body Section .............................................................................C-21
4. Detection Function .............................................................................C-25
4-1. Personnel Protection ...................................................................................C-26
4-1-1. Safety switch/lock cylinder of the splash cover ..................................C-27
4-2. Machine Protection......................................................................................C-28
4-2-1. Air pressure sensor............................................................................C-29
4-2-2. Flow rate sensor [Optional accessory] ...............................................C-30
D. ADJUSTMENT OPERATION........................... D-1
1. Chuck Table Replacement....................................................................D-2
1-1. Chuck Table Classification ...............................................................................D-3
1-2. Chuck Table Replacement ...............................................................................D-6
1-2-1. Precautions for replacing the old type chuck table...............................D-7
1-2-2. Chuck table replacement procedure ..................................................D-12
1-2-2-1. Removing the chuck table ..................................................................................D-14
1-2-2-2. Mounting the chuck table....................................................................................D-16
1-3. Changeover to the New Type Chuck Table ....................................................D-18
2. Flange/Wheel Mount Replacement ....................................................D-19
2-1. Flange Replacement....................................................................................D-20
2-1-1. Removing the flange ..........................................................................D-22
Sample