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Contents-2

CONTENTS

C. MACHINE COMPONENTS

AND FUNCTIONS............................................ C-1

1. Machine Outer Cover ...........................................................................C-2

2. Axis Section .........................................................................................C-5

2-1. Axis Arrangement ..........................................................................................C-6

2-2. X-axis Section................................................................................................C-7

2-3. Y-axis Section................................................................................................C-9

2-4. Z-axis Section.............................................................................................. C-11

2-5. θ-axis Section ..............................................................................................C-13

2-6. Microscope Section .....................................................................................C-16

2-7. Spindle-axis Section ....................................................................................C-17

3. Main Body Section .............................................................................C-21

4. Detection Function .............................................................................C-25

4-1. Personnel Protection ...................................................................................C-26

4-1-1. Safety switch/lock cylinder of the splash cover ..................................C-27

4-2. Machine Protection......................................................................................C-28

4-2-1. Air pressure sensor............................................................................C-29

4-2-2. Flow rate sensor [Optional accessory] ...............................................C-30

D. ADJUSTMENT OPERATION........................... D-1

1. Chuck Table Replacement....................................................................D-2

1-1. Chuck Table Classification ...............................................................................D-3

1-2. Chuck Table Replacement ...............................................................................D-6

1-2-1. Precautions for replacing the old type chuck table...............................D-7

1-2-2. Chuck table replacement procedure ..................................................D-12

1-2-2-1. Removing the chuck table ..................................................................................D-14

1-2-2-2. Mounting the chuck table....................................................................................D-16

1-3. Changeover to the New Type Chuck Table ....................................................D-18

2. Flange/Wheel Mount Replacement ....................................................D-19

2-1. Flange Replacement....................................................................................D-20

2-1-1. Removing the flange ..........................................................................D-22

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DISCO DAD321 Maintenance Manual

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