Contents-3
CONTENTS
2-1-2. Mounting the flange............................................................................D-24
2-2. Wheel Mount Replacement .........................................................................D-26
2-2-1. Removing the wheel mount................................................................D-28
2-2-2. Mounting the wheel mount.................................................................D-30
3. Sensor Adjustment.............................................................................D-32
3-1. Air Pressure Sensor Adjustment..................................................................D-33
3-1-1. Removing the outer covers ................................................................D-34
3-1-2. Adjusting the air pressure sensor.......................................................D-35
E. ENGINEERING MAINTENANCE
OPERATIONS.................................................. E-1
1. Calling up ENGINEERING MAINTENANCE Screen ............................E-2
2. Wheel Mount/Flange Conditioning .......................................................E-5
2-1. Movement in Conditioning ............................................................................. E-6
2-1-1. Flange conditioning.............................................................................. E-7
2-1-2. Wheel mount conditioning.................................................................... E-8
2-2. Executing Conditioning.................................................................................. E-9
2-2-1. Replacing the chuck table.................................................................. E-11
2-2-2. Verifying CONDITIONING screen data .............................................. E-12
2-2-3. Executing conditioning ....................................................................... E-15
2-2-4. Checking the end face accuracy........................................................ E-19
2-2-5. Completion of conditioning................................................................. E-20
3. Axis Operation Check.........................................................................E-21
4. Sensor/Solenoid Valve Check ............................................................E-25
4-1. Digital I/O Check.......................................................................................... E-26
4-2. Axis Sensor Check ...................................................................................... E-29
5. Customizing Setting ...........................................................................E-33
5-1. Setting on USER DEFINE DATA 1 Screen .................................................. E-34
5-2. Setting on USER DEFINE DATA 2 Screen .................................................. E-43
5-3. Setting Password......................................................................................... E-47
5-4. Setting on HAIRLINE ADJUSTMENT Screen.............................................. E-50
6. Log Viewer .........................................................................................E-53
7. Maker Data.........................................................................................E-61