Need help?Do you have a question about the entegris SemiChem APM 2000 and is the answer not in the manual?
List and description of items included in the SemiChem APM 200 start-up kit.
Procedure for installing the glass burette assemblies into the piston and guideposts.
Instructions for connecting reagent tubing and filling reagent bottles.
Guide for installing ORP and fluoride ion selective electrodes into the measuring cell.
Checks and verifications for utilities, exhaust, and general system readiness.
Procedure for flushing the burettes with reagents to purge air and fill completely.
Configuration options for tailoring the SemiChem APM 200's behavior to specific process needs.
Overview of default recipes and parameters for optimizing performance.
Detailed steps for the initial operation and measurement sequence of the system.
Procedure for calibrating the SemiChem APM 200 to the specific process conditions.
General| Category | Test Equipment |
|---|---|
| Manufacturer | Entegris |
| Wafer Size | 200 mm |
| Application | Semiconductor processing |
| Pressure Range | Atmospheric |
| Material Compatibility | Semiconductor-grade materials |
| Model | SemiChem APM 2000 |
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