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entegris SemiChem APM 2000 User Manual

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ADVANCED MATERIALS HANDLING | APPLICATION GUIDE
SemiChem APM 200 with HF and
H
2
O
2
in DSP+
Application guide

Table of Contents

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entegris SemiChem APM 2000 Specifications

General IconGeneral
CategoryTest Equipment
ManufacturerEntegris
Wafer Size200 mm
ApplicationSemiconductor processing
Pressure RangeAtmospheric
Material CompatibilitySemiconductor-grade materials
ModelSemiChem APM 2000