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ferrotec EVM-4 - User Manual

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ferrotec EVM-4 Specifications

General IconGeneral
Brandferrotec
ModelEVM-4
CategoryIndustrial Equipment
LanguageEnglish

Summary

Overview and Intended Use

2.1 Overview

Provides a general overview of the electron beam evaporators and their main components.

2.2 Intended Use

Describes the purpose and application of the EVM-4, -6, -8, and -10 electron beam evaporators.

Technical Specification

2.3.1 Product Data

Details product specifications including materials, operating conditions, and connections.

2.3.2 Production Data, Dimensions and Weights

Lists production data, physical dimensions, and weights for different EVM models.

2.3.3 General Specification

Covers general specifications such as ambient temperature range and noise emission.

Safety

3.1 Safety Information and Identification

Explains safety symbols, provides notes, and details machine identification.

3.2 Integrated Safety Systems

Describes the integrated safety systems and their operational checks.

3.3 Interfaces on the Electron Beam Evaporator

Identifies and describes the various interfaces on the electron beam evaporator.

3.4 Operator Safety Responsibilities

Outlines operator responsibilities, safety precautions, and legal compliance.

3.6 Safety Inspections and Tests

Details mandatory safety inspections and tests for the equipment.

General Warnings

4.1 Dangers

Lists and explains various dangers associated with the electron beam evaporator.

4.2 Operating Areas and Danger Zones at the Machines

Defines the operating areas and specific danger zones around the machine.

4.3 Operating and Maintenance Personnel

Specifies requirements and responsibilities for personnel involved in operation and maintenance.

4.4 Spare and Wearing Parts

Discusses the use of spare parts and the implications of using non-original components.

4.5 Shut Down Procedure

Provides a step-by-step guide for safely shutting down the electron beam evaporator.

Installation

5.1 Delivery Package

Lists the components included in the delivery package of the evaporator.

5.2 Transport and Packaging

Covers guidelines for transporting and packaging the equipment.

5.4 Additional Equipment (by operator)

Details required additional components like power supply, feedthroughs, and interlocks.

5.5 Assembly, Installation

Details the steps for assembling the evaporator and installing it, including safety checks.

Function and Operation

6.1 Initial Start Up

Guides through the initial start-up process, including visual checks and crucible setup.

6.1.1 Evaporation Material

Details how to fill crucibles and select evaporation materials for optimal results.

6.1.1.6 High Voltage

Instructions on switching on and managing high voltage during operation.

6.1.1.10 Evaporation

Explains how to increase emission current for material evaporation and control the rate.

Operation

7.1 System Overview

Illustrates the system setup with its main components like power supply and controller.

7.2 Modes of Operation

Refers to separate instruction handbooks for detailed modes of operation.

Cleaning;Maintenance

8.1 Complete Daily Cleaning

Outlines the procedure for daily cleaning of the electron beam evaporator.

8.2 Maintenance

Covers maintenance procedures, function tests, and inspections for the equipment.

8.3 General Maintenance Instructions

Provides general maintenance guidelines and lists components for various parts like the evaporator and drive unit.

8.4 Exchange of the Hearth Assembly

Describes the procedure for safely exchanging the hearth assembly of the evaporator.

8.5 Maintenance of Individual Components

Details specific maintenance tasks for individual components like filament block, rotary feedthrough, and calibration.

8.6 Inspection of the Machine

Specifies checks to be performed after cleaning, maintenance, and repair work.

Troubleshooting

9.1 Fault Finding

Provides a guide to identifying and resolving common faults in the evaporator and associated systems.

Emergencies

Dismantling;Disposal

11.1 Dismantling

Outlines the procedure for dismantling the electron beam evaporator, performed by skilled personnel.

11.2 Disposal

Provides guidance on the proper disposal of the machine and associated materials.

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