ferrotec EVM-4 User Manual

&"&'+ .+ .+ /.+ 
3.3 '&
B'C'
There are the following interfaces on the electron beam evaporator:
$ :C'
$ @-*''
,$ 23
$ <*-&--2'&&(1(
?$ @#7&*8
$ :2&''
3.4 :'6"&7
-3(&
• &'-3*('3-&-')-
'%(23*
• &-13'&%%2*'&*-&3
3'2I&3($
• -#(&&-1--P*-('-7#-'--
'%(23-%%&8%1&&-P*373*
('3832*$-((&(''*:"">
,/?%'(3*#-#--'%(23$
+$,$ 3?; <'(%=



,

?

.
-

ferrotec EVM-4 Specifications

General

Brand	ferrotec
Model	EVM-4
Category	Industrial Equipment
Language	English