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General| Accuracy | 2nm or 0.2% |
|---|---|
| Precision | 0.2nm |
| Stability | 0.05nm |
| Wavelength range | 380-1050nm |
| Spot size | 250um aperture: 50um@5x, 17um@15x (on request) 500um aperture: 100um@5x, 33um@15x |
| Typical speed | 5 points: 5’’ 25 points: 25’’ 56 points: 29’’ |
Weight and Dimensions| Thickness Range | ~20nm -- ~40um |
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