FILMETRICS F54 - User Manual

Filmetrics F54
Thin Film Mapping Analyzer
User Manual

Summary

Safety Warnings

Fiber and Stage Handling Safety

Warnings against touching/bending fibers and keeping hands away from the high-speed stage.

Optics and Mirror Protection

Sample and Mirror Safety Warnings

Warnings to prevent damage to stage reference mirror and measurement objectives.

Instrument Startup

Turn Light Source On

Software Operation

Start FILMapper Software

Steps to launch and initialize the FILMapper software.

Stage Operation

Move Stage to Load Position

Recipe Management

Select and Edit Recipe

Recipe Selection

Pick a Recipe

Film Stack Configuration

Define Film Stack

Analysis Configuration

Specify Analysis Options

Wafer Map Configuration

Configure Wafer Map Settings

Acquisition Settings

Set Acquisition Parameters

Objective and Baseline

Objective and Baseline

Selecting the correct objective and performing a baseline measurement.

Baseline Procedure

Baseline Procedure Steps

Step-by-step guide for executing the baseline measurement.

Baseline Calibration

Calibration Sample Usage

Perform Baseline Steps

Sample and Reference Reflectance

Performing sample reflectance and reference standard reflectance measurements.

Point Measurements

Perform Point Measurements

Wafer Mapping

Execute Wafer Mapping

FILMETRICS F54 Specifications

General

Accuracy	2nm or 0.2%
Precision	0.2nm
Stability	0.05nm
Wavelength range	380-1050nm
Spot size	250um aperture: 50um@5x, 17um@15x (on request) 500um aperture: 100um@5x, 33um@15x
Typical speed	5 points: 5’’ 25 points: 25’’ 56 points: 29’’

Weight and Dimensions

Thickness Range	~20nm -- ~40um